强韧化碳基复合薄膜的多元/多界面结构可控与性能关联性

为实现类金刚石薄膜集高硬度、高韧性、低摩擦和低磨损于一体，从薄膜微观结构调控、材料特性协同和界面优化三方面设计入手，围绕强韧化碳基复合薄膜多元/多界面微结构可控与性能关联性的研究，将复合薄膜体系热力学驱动力、薄膜沉积动力学及各相界面结构的模拟计算与微观结构调控、成份设计和表/界面结构构筑相结合，采用等离子体薄膜沉积技术、离子源与脉冲高压技术，以多层梯度、多元掺杂、多相复合的薄膜结构设计方法，实现高硬度/高韧性碳基复合薄膜可控制备和碳基复合体系的多元/多界面构筑，探索多元/多界面耦合设计复合薄膜材料的结构与性能关联性，提出该类复合薄膜材料的延寿理论和增韧模型，为以无油润滑关键零部件为代表的摩擦副表面高可靠和长寿命强化与润滑一体化复合薄膜体系的设计、制备及应用提供新思路和新途径。

In order to obtain the carbon-based film with high hardness and toughness, low friction coefficient and wear rate, we can investigate the objective from the points of film micro-structure adjustment, material properties cooperation and interface optimization. With the theme of researching the relationship between the properties and the micro-structure of the strengthened carbon based composite films with multi-element/multi-interface, combining the thermodynamics driving force of the composite film system, film deposition dynamics, simulation of phase interface, micro-structure adjustment, composition designing and surface/interface constructional technology, employing plasma deposition technology, ion source and pulse high-voltage technology and the structure design approach of multi-layer gradient/multi-doped/multi-phase composite, we can realize the well controlled deposition of the high hardness/high toughness carbon-based composite films, and the construction of multi-element/multi-interface in the carbon based composite film system, by which we can investigate the relationship between properties and micro-structure of the carbon-based composite films with multi-element/ multi-interface, analyzing the toughness-improvement model and life prolongation theory of the composite film materials, providing new approaches for the designing, deposition, and the application of the carbon-based composite film with excellent lubrication, high duration and high reliability on the surface of the oil-free lubricate parts.