射频识别(RFID)是实现物联网的关键技术。RFID标签具有唯一的电子编码，是射频识别系统真正的数据载体。使用薄膜晶体管(TFT)工艺替代单晶硅工艺制备RFID标签来解决传统RFID标签IC芯片与天线整合的问题并预期将来可实现柔性RFID标签，是目前学术界和产业界的研究热点。本申请课题基于金属氧化物TFT相关技术及其器件特性研究设计天线、调制解调电路、整流稳压电路、时钟及数字逻辑电路、EEPROM存储电路等，实现在同一玻璃衬底上一体化集成13.56MHz无源RFID标签。通过解决金属氧化物TFT集成电路的低功耗设计、模拟电路工作稳定性及集成中信号完整性等关键科学问题，希望凝炼金属氧化物TFT集成电路（数字、模拟）的共性技术,为在柔性衬底上实现柔性RFID标签奠定良好基础。

Radio frequency identification (RFID) is the key technology to realize the internet of things. RFID tag which has a unique electronic code is the data carrier in the RFID system. The thin film transistors (TFTs) process is used to fabricate the RFID tag in replace of the crystalline silicon process, which may solve the bonding problem between antenna and IC chip in the conventional RFID tag. Moreover, the TFTs process is hopeful to achieve the flexible RFID tag, which has gained much interest in academics and industry. In this project, we will study and design the antenna, modulator-demodulator circuit, rectifier and voltage regulator circuit, clock generator and digital logic circuit and EEPROM memory circuit based on the related technologies of metal oxide TFTs and their characteristics. The final target is to integrate 13.56MHz passive RFID tag in the same glass substrate. We hope to extract the general technologies of the metal oxide TFTs digital and analogous integration circuits by solving the scientific problems of low power design of metal oxide integration circuits, the work stability of analogous integration circuits and the signal integrity of integration. Those research works will lay a good foundation for realizing the flexible RFID tag in the flexible substrate in future.