石墨烯二氧化硫传感性质的定量研究

The gas sensor of graphene is particularly sensitive to gas molecule due to its huge specific surface area and high quantum conductivity. However, the reset and repeatability of graphene gas sensor are still unsatisfactory. It is impossible for us to get the relationship between the concentration of gas molecule and the conductivity of graphene. In the past research, the applicant has proved that graphene FET is very sensitive to 50 ppm sulfur dioxide molecule. Base on this conclusion, the unique band gap, electronic structure and energy band structure of graphene will been studied. Besides, a new model of the interaction of graphene and sulfur dioxide will been established. We will try different constructs, substrates and sizes by MEMS to find the most suitable property of the sensor. Finally, a grephene gas sensor sealed in vacuum and 100 degrees C will been standardized to make the change from qualitative analysis to quantitative analysis.

石墨烯有巨大的比表面积和高水平的量子电导率，使其制成的传感器对气体分子十分敏感，然而由于器件重置和重复性等问题，现有对石墨烯气体传感器的研究都只是定性的分析，还无法实现对气体浓度的定量测量。在前期研究中，项目申请人已经验证了石墨烯场效应管对浓度为50 ppm的二氧化硫有很敏感的响应。本研究将从密度泛函理论出发，结合二氧化硫分子结构和石墨烯的特有的带隙、电子和能带结构，从微观上构建不同浓度二氧化硫与石墨烯相互作用的物理模型。并利用微纳加工技术改变FET的结构、基底和尺寸，寻求最适合检测二氧化硫的器件参数。本研究将制成封装在100℃和真空条件下的石墨烯二氧化硫传感器，对其进行定量标定，实现石墨烯气体检测从定性分析到定量测量的突破。

本项目采用化学气相沉积制备并转移得到高性能石墨烯，研究了石墨烯背栅场效应晶体管对二氧化硫的传感特性。利用微纳加工技术改变FET的结构、基底和尺寸，获得了最适合检测二氧化硫的器件参数，研究了石墨烯背栅场效应晶体管封装在100℃和真空条件下的二氧化硫传感器，对其进行了定量的标定，为实现石墨烯气体检测从定性分析到定量测量的突破奠定了坚实的基础。

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