肺癌是当前人类健康的头号威胁，研制高灵敏电子鼻系统实现肺部的早期诊断是当今的研究热点，传统FBAR器件的谐振频率和品质因数由于压电响应的局限性无法获得进一步提升，无法从根本上解决ppb浓度下的气体探测以及对肺癌早期患者呼出气体成分的定量检测。本项目创新性提出利用反铁电材料相变致动效应制备FBAR气体传感阵列，旨在为具有新材料和新效应的高性能FBAR在高精度电子鼻医疗设备中的应用和推广奠定理论基础和提供关键技术支持。研究气体动态吸附对谐振特性的扰动规律；揭示外电场对PLZT结构相变过程的调控机理，以及相变致动与硅微构件间的机电耦合规律和谐振机制；探明气体检测动态过程中的噪声模型；探究纳米材料改性方法，实现谐振阵列结构对目标气体分子的广谱和差异性吸附；突破传统气体传感阵列器件对ppb量级特征气体探测困难的技术瓶颈，为高性能电子鼻的研制及其微质量探测提供理论支持。

Lung cancer is the main threat to human health. Developing a highly sensitive electronic nose system to achieve early diagnosis of the lung is a hot topic. The resonance frequency and quality factor of traditional FBAR devices cannot be further improved due to the limitations of piezoelectric response,which could not meet the gas detection at ppb concentration and the quantitative detection of exhaled gas components in early lung cancer patients. This project innovatively proposes the use of anti-ferroelectric material phase change actuation effect to prepare FBAR gas sensing array, aiming at laying a theoretical foundation for the application and promotion of high-performance FBAR with new materials and new effects in high-precision electronic nose medical equipment. The disturbance law of the dynamic adsorption of gas on the resonance characteristics is studied. The regulation mechanism of the external electric field on the phase transformation process of PLZT structure is revealed, as well as the electromechanical coupling law and resonance mechanism between phase change actuation and silicon micro-components. The noise in the dynamic process of gas detection is established. Analyze the model and explore the nanomaterial modification method to achieve broad-spectrum and differential adsorption of the target gas molecules by the resonant array structure; break through the technical bottleneck of the traditional gas sensing array device to detect the characteristic gas of the ppb level, providing theoretical support for the development of high-performance electronic nose and its micro-mass detection.