基于高速原子力显微镜的纳米线图形高效组装技术研究

批准号:
61973233
项目类别:
面上项目
资助金额:
58.0 万元
负责人:
吴森
依托单位:
学科分类:
机器人学与智能系统
结题年份:
2023
批准年份:
2019
项目状态:
已结题
项目参与者:
吴森
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中文摘要
纳米线具有诸多优异物理特性,是构筑纳米光电器件的重要单元。纳米线的排列有序性直接影响器件性能,现有器件制备工艺在纳米线位姿控制上的不足导致器件性能不够理想。基于原子力显微镜(AFM)的纳米操纵技术能够以纳米级精度调控纳米线单体,但因效率过低未能广泛使用。课题将高速AFM仪器技术与自动化纳米操纵技术结合,探索高效组装纳米线图形的新途径。基于弹性力学理论建立高速操纵过程中针尖与纳米线的动力学行为模型,通过有限元仿真和热传递方程评估高速碰撞和滑动所致的损伤并建立纳米线快速无损移动策略;采用电荷驱动和非线性控制等技术提高压电扫描器的高速矢量运动精度;借助图论理论解决多对象移动排序和路径规划问题;通过机械操纵实现不同种类纳米线的原位辨识和混合装配。以自主开发的高速AFM系统为实验平台,实现若干典型纳米线图形的快速自动化组装。项目研究成果将为高性能纳米线器件的高效制备提供技术支持。
英文摘要
Nanowires have many excellent physical properties and are important units for building nano-optoelectronic devices.The performance of nanowire devices is directly related to the arrangement of nanowires. The main reason for the unsatisfactory performance of the devices is the deficiency of the existing device preparation technology in the control of nanowire pose.Nano-manipulation based on atomic force microscopy (AFM) is the only way to precisely move individual nanowires, but it is not widely used due to its low efficiency.This project intends to apply high-speed AFM instrument technology to the field of nano-manipulation, and explore a new way to assemble nanowire graphics efficiently.In this project, a new method for highly efficient assembly of nanowire patterns is proposed based on the high-speed AFM and the automatic manipulation technology. Firstly, the behaviors of the AFM probe and the nanowire in high-speed manipulation will be modelled using the continuum mechanics. The FEM simulations will be used to study the possible damage to the tip and nanowire during the process of high-speed collision and sliding. Based on the research conclusion, a nondestructive manipulation strategy will be established for the individual nanowire. New technologies such as the charge control will be used to improve the dynamic performance of the piezo-scanner. The graph theory will be applied to optimize the movement paths and orders of multi objects when assembling them into complex patterns. We will also study the method of in situ identification of different types of nanowires and establish a new strategy for mix-assembly of different materials. An intelligent auto-manipulation software will be developed for the high-speed AFM system which we developed recently. Finally, this system will be used to realize high efficiency assembly of typical nanowire patterns and devices. The research results of this project will provide technical support for the efficient preparation of high performance nanowire devices.
期刊论文列表
专著列表
科研奖励列表
会议论文列表
专利列表
DOI:10.1063/10.0003218
发表时间:2021-03-01
期刊:NANOTECHNOLOGY AND PRECISION ENGINEERING
影响因子:--
作者:Bai, Huitian;Wu, Sen
通讯作者:Wu, Sen
DOI:10.3969/j.issn.1674-8042.2020.04.011
发表时间:2020
期刊:Journal of Measurement Science and Instrumentation
影响因子:--
作者:Zhang Rui;Wu Sen;Xiao Shasha;Hu Xiaodong;Shi Yushu;Fu Xing
通讯作者:Fu Xing
DOI:10.1364/oe.494572
发表时间:2023
期刊:Optics Express
影响因子:--
作者:Yujian Hong;Shasha Xiao;Cong Zhai;Nianhang Lu;Guangyu Geng;junsheng lu;Sen Wu;Chunguang Hu;Xiaodong Hu
通讯作者:Xiaodong Hu
DOI:10.1063/10.0021195
发表时间:2023-10
期刊:Nanotechnology and Precision Engineering
影响因子:--
作者:Yilin Wang;E. Wu;Jirui Liu;Mengke Jia;Rui Zhang;Sen Wu
通讯作者:Yilin Wang;E. Wu;Jirui Liu;Mengke Jia;Rui Zhang;Sen Wu
DOI:10.1093/micmic/ozac026
发表时间:2023-01
期刊:Microscopy and Microanalysis
影响因子:2.8
作者:N. Lu;Yilin Wang;S. Xiao;Rui Zhang;T. Xue;X. Hu;Sen Wu
通讯作者:N. Lu;Yilin Wang;S. Xiao;Rui Zhang;T. Xue;X. Hu;Sen Wu
新型复合式三维原子力显微镜成像理论与技术的基础研究
- 批准号:61204117
- 项目类别:青年科学基金项目
- 资助金额:26.0万元
- 批准年份:2012
- 负责人:吴森
- 依托单位:
国内基金
海外基金
