空气静压支承是超精密制造装备中的关键部件，提高动刚度和抗扰动能力是使其满足超精密加工需求的核心。通常通过增供压、降膜厚、优化支承结构等手段来提高动刚度，但这易导致气膜内局部气流紊乱而降低稳定性，且仍不能主动消减导轨误差和负载扰动。本项目试图利用阵列式压电智能结构主动调控气膜形状，提高支承动刚度并主动抑制扰动，从而保证支承刚度和稳定性。为此，围绕动态变化气膜的承载力和动刚度形成机制、多物理量/场作用下气膜形状的主动调控方法两个科学问题，开展以下研究工作：多物理量/场统一建模与分析，动态气膜形态与动刚度的关系解析，含压电智能结构的主动气浮支承结构优化设计，支承状态的在线测量与控制方法，主动气浮支承原型的搭建与实验测试。通过上述研究，揭示气膜形状及其动态变化规律对的承载力和动刚度的影响规律，阐明阵列式压电智能结构主动调控气膜形状、增强动刚度的机制，为高性能运动支承部件的设计提供理论和技术支持。

Aerostatic bearings are key components in precision manufacturing equipment. The crucial issue for their applications in ultra-precision machining is to improve the dynamic stiffness and ability of disturbances suppression. Conventional approaches for dynamic stiffness enhancement are to increase pressure of air supply, to reduce air gap, or to optimize the structures. However, this might cause local turbulences in gas film which result in deterioration of stability. Besides, these kind of aerostatic bearings still lack of ability to actively suppress disturbances such as geometrical error of guide way and load variation. This project tries to improve dynamic stiffness and disturbances suppression by means of actively control the shape of gas film via piezoelectric actuator array, so as to guarantee stiffness and stability of aerostatic bearings. Focused on the following two key scientific challenges, i.e., 1) the generation mechanism of load capacity and dynamic stiffness due to dynamic changes of gas film, and 2) the method for film shape control under multi-physics effect, this project will carry out the following studies: multi-physics modeling and analysis of active aerostatic bearings, analysis of the relationship between dynamic change of gas film and the dynamic stiffness, optimal design of active aerostatic bearings with piezoelectric actuator array, on online measurement and control of suspension status, and development and experimental verification on active aerostatic bearing prototype. Based on the aforementioned researches, the influences of dynamic gas film shape on the load capacity & dynamic stiffness will be revealed, and the mechanism of dynamic stiffness enhancement via gas film shape control by means of piezoelectric actuator array will be clarified. Research achievements of this project will facilitate development of high performance suspension components in ultra-precision manufacturing machines both scientifically and technically.