等离子增强化学气相沉积法（PECVD）合成的三维石墨烯具有优良的比表面积与导电性，已成功应用于储能器件等诸多领域。三维石墨烯的应用效果与其形貌结构密切相关，但目前PECVD三维石墨烯形貌结构难以控制的问题阻碍了其应用范围及效果的提升。结合文献报道和申请人前期研究可知三维石墨烯形貌的精确控制无法仅通过调节生长条件来实现。三维石墨烯形貌结构的控制需从参与生长的活性粒子（激子、带电粒子）的控制入手。本项目拟开发离子运动控制PECVD，建立磁场、离子透镜组和电场组成的离子运动控制腔，结合其他生长条件，实现对参与生长的活性粒子的相对含量、种类和运动行为的控制；研究激子、带电粒子在三维石墨烯生长过程中的作用，阐明形貌控制理论，建立形貌控制方法；进行多步骤组合生长，实现复合结构三维石墨烯的定制。本项目旨在从理论和技术上实现三维石墨烯形貌结构的按需定制，为提升石墨烯的应用效果、扩大其应用范围提供新方法。

Three-dimensional (3D) graphene synthesized by plasma enhanced chemical vapor deposition (PECVD) method possesses a unique spatial structure, which achieves extraordinary performances in various areas such as supercapacitors and catalysis. The structure of 3D graphene determines its application performances. However, the uncontrollability of the morphology of 3D graphene has set great obstacles for its structure optimization and application expansion. According to the literature survey and our previous research, we have found that the control of growth conditions is far from enough to precisely control the morphology of 3D graphene. The control of active particles inside plasma (radicals and charged particles) is the key to realize the morphology control of 3D graphene. Therefore, this research proposed a new PECVD, ion motion control PECVD (IMC-PECVD), by installing an ion motion control chamber composed of magnetic fields, ion lens and electric fields to control the graphene growth process. During the IMC-PECVD growth process, the motion and relative contents of the active particles are synergistically controlled by the magnetic field, ion lenses, electric field and other growth conditions. In this research, we are aiming to elucidate the morphology control mechanism of 3D graphene by the IMC-PECVD, develop a process to control the structure of 3D graphene, and fabricate 3D graphene with customized morphology by a multi-step fabrication process. This research intends to realize the morphology customization of 3D graphene to fulfill the requirements of the target applications, which will provide theoretical and experimental supports for enhancing the properties and broadening the application areas of 3D graphene.