微尺度刃口金刚石刀具易于实现硬脆材料延性域加工。金刚石刀具硬度高、耐磨损，但切削刃的刃口难于刃磨到微尺度，而硬质合金刀具切削刃的刃口易于刃磨到微尺度，但与金刚石刀具相比易磨损，寿命低。本项目提出先刃磨硬质合金刀具获得微尺度刃口，进而在硬质合金刀具刃口衬底沉积类金刚石薄膜涂层，研制具有微尺度刃口、较强抗磨损能力和较高刀具寿命的类金刚石薄膜涂层硬质合金刀具，并探讨其加工硅晶体的切削性能。本项目通过研究硬质合金刀具衬底的脆-延转变低损伤机械刃磨机理，利用声发射传感器接收并分析因材料裂纹、塑性变形等引起应变能快速释放而产生的应力波，评定刀具刃口表面完整性；研究刀具微尺度刃口的机械刃磨工艺和类金刚石薄膜涂层的沉积工艺，建立类金刚石薄膜涂层硬质合金刀具的制备技术；探讨类金刚石薄膜涂层硬质合金刀具在硅晶体表面制绒中的切削性能，为用于光伏太阳能电池的硅晶体表面制绒高效精密加工提供基础理论和工艺技术。

The hard and brittle material is apt for ductile transition in microscale edge of diamond tool cutting. However it is difficult to sharpen the cutting edge because of high hardness and wear resistance of diamond tool. It is easy to sharpen the cutting edge of the cemented carbide tool which is lower wear and life than the diamond tool. In this project a new preparation method of cutting tool is studied to sharpen the cutting edge, improve the wear resistance and lengthen tool life. At first, the cemented carbide tool is sharpened for microscale edge by precision grinding and lapping. Then, the diamond like carbon (DLC) film is deposited on the substrates of the cemented carbide tool. A new cemented carbide cutting tool coated with DLC film is fabricated. In experiment, the new tool cutting performance is researched in cutting the silicon crystal. In the project, the brittle-ductile transition mechanism of the cemented carbide is studied in grinding and mechanical lapping. The acoustic emission sensor is utilized to receive the stress wave signals and assess the surface integrity of the cutting edge. The stress wave signals are generated by the material cracks, plastic deformation and the rapid release of strain energy in grinding and mechanical lapping. It is very important to research the microscale cutting edge of the cemented carbide in grinding and mechanical lapping. It is an eventful technology of DLC film deposition process. A new cemented carbide tool fabrication with DLC film preparation is established. The cutting performance is studied for DLC film coated cemented carbide tool in texturing silicon crystal process. By this project, the new theory and technology are provided for silicon crystal surface texturing of photovoltaic solar cells in high-precision machining.