Experimental study of the pyramidal texturization on the surface of photovoltaic silicon with cemented carbide micro-milling tool

Experimental study of the pyramidal texturization on the surface of photovoltaic silicon with cemented carbide micro-milling tool
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硬质合金微铣刀光伏硅表面金字塔织构实验研究

DOI:
10.1007/s00170-017-0388-9
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发表时间:
2017-04
影响因子:
3.4
通讯作者:
Ge Peiqi
Ge Peiqi
中科院分区:
工程技术3区
文献类型:
--
作者:
Yang Shengyao;Zhang Lei;Ge Peiqi

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在高效硅太阳电池表面可以制作一些抗反射结构。能够提高防反射效率,因此能够提高光电转换效率。不同的减反射结构对光学反射率的影响不同。前向随机金字塔结构可以机械制造。在加工金字塔结构之前,必须先加工出单向V形槽阵列。本文的研究内容是在前人研究的基础上进行的。探索了在硅片表面制作不同深度V型槽的方法。采用硬质合金构成的微铣削刀具。对V型槽成品的质量进行了检测和分析。然后评估了结构对反射率的影响。将计算得到的V型槽反射率与理论模型进行了比较。通过与现有技术的对比,获得了令人满意的值。此外,在加工后观察工具,以评估工具磨损。结果表明,用该微铣刀加工金字塔结构是可行的。
Some anti-reflection structures can be fabricated on the surface of high-efficiency silicon solar cells. The anti-reflection efficiency can be increased and hence the photoelectric conversion efficiency can be increased. The effects of varied anti-reflection structure are altered on the optical reflectance. The forward stochastic pyramid structure can be fabricated mechanically. Before processing the pyramid structure, a unidirectional V-groove array must be fabricated firstly. The research content of this paper was based on our previous researches. The fabrication of V-groove with different depth on the surface of silicon wafers was explored. Micro-milling tool constituted by cemented carbide was used. The quality of completed V-grooves was measured and analyzed. Then the effect of the structure for the reflectance was evaluated. The calculated reflectance of accomplished V-grooves was compared with that of the theoretical model. A satisfactory value was obtained by contrast with existing technologies. Furthermore, the tools were observed after the processing, to evaluate the tool wear. Results indicated that processing the pyramid structure using the micro-milling tool is feasible.
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