近年来声表面波（SAW）滤波器在移动通讯系统的单机用量不断增长，提高器件集成度成为迫切需求。本项目提出研究基于声电放大效应的新型射频SAW器件，提高射频前端模块集成度。利用声波传播区域的声电放大效应对声波放大，同时结合SAW原有的滤波功能，在单一器件上实现两种功能。目前声电放大器件在低驱动电压下的放大倍数还不能满足实际需求，且噪声水平很高。项目拟通过构造Love波层状结构器件，使声波能量限制在半导体薄层内，与载流子更好的作用；同时制备高迁移率、低缺陷、合适载流子浓度的高质量半导体薄层，提高放大倍数。理论上阐明SAW在薄层中的传播特性及与驱动载流子的相互作用，抑制放大器噪声，构建包含声电放大效应的跨尺度器件模型。制备出声电放大器件，放大电压阈值小于10V，放大系数>30dB/mm，噪声小于10dB。探索声电放大效应在下一代射频系统中的器件应用，设计出隔离器、振荡器等新型原型器件。

Increasing quantities were required for surface acoustic wave filters in mobile communication system in recent years, making improvement on the device integration has become an urgent need. This project proposes to study a new type of RF SAW device based on the acoustoelectric amplification effect to improve the integration of the RF front-end system. Acoustoelectric amplification effect occurring in the SAW propagation area were adopted to amplify the acoustic wave signal, combined with the original SAW filter function, which makes two function being integrated on a single device. At present, the amplification factor of acoustoelectric amplifier device at low driving voltage cannot meet the actual demand, while the noise level is very high. To increase the magnification, devices with Love wave layered structure will be designed to confine the acoustic wave energy to the semiconductor thin layer where the acoustic wave can well interact with the driven carriers, while high mobility, low defect, suitable carrier concentration of high-quality semiconductor thin layer will be prepared. Theoretical analysis on the SAW propagation characteristics in the thin layer and the interaction with the driving carriers will be performed to suppress the device noise level. A multi-scale device model that includes acoustoelectric amplification will be constructed to optimize the device performance. The SAW amplification devices will be presented with amplification voltage threshold < 10V, amplification factor > 30 dB/mm, noise level < 10 dB. Several new device structures will be explored for the next-generation RF systems and new SAW prototypes are intended to be presented such as isolators and oscillators.