电子皮肤是一种用于实现仿人类触觉感知功能的人造柔性电子器件，在人工智能、可穿戴设备和皮肤修复医学等领域具有广阔的发展空间。电子皮肤首先要具备辨别细微压强及其分布的触觉功能，具有高灵敏触觉系统的电子皮肤是当今国际上最热门的前沿研究领域之一。本研究以新型压光模式的触觉传感器为主要目标，以掺Pr3+铌酸锂单晶薄膜应力荧光为压力探测媒介，以图案化ZnO纳米柱阵列作为压力发光触发点，构建“纳米阵列/应力发光薄膜/衬底”三维结构器件。在关键材料制备技术上，通过温场优化设计实现不同Li/Nb配比掺Pr3+铌酸锂晶体的生长技术；研究掺Pr3+铌酸锂的应力发光机理，明确单晶薄膜应力发光过程中力-电-光三种物理信号的相互作用关系；通过研究ZnO在柔性衬底上成核和生长机制，实现图案化ZnO纳米柱阵列制备技术，进而研究ZnO纳米柱压电效应对于单晶薄膜应力发光的压电增强效应，实现高分辨率、高灵敏性的触觉传感技术。

Electric skin is a kind of artificial flexibility electronic device, which can simulate human tactile sense via electronic methods. Electric skin is widely applied in artificial intelligence, wearable device and skin repairing fields. The electric skin should detect a very weak pressure as well as the pressure distribution, which been brought into research focus internationally. In this proposal, the novel tactile sensor is designed as the 3D structure of ZnO nanorods-LiNbO3:Pr3+-Substrate, where the advantageous mechanouminescence of the Pr3+ doped LiNbO3 (LiNbO3:Pr3+) single-crystal film works as the pressure-detection medium, and the single ZnO nanorod as a pixel. As the key material, the LiNbO3:Pr3+ crystal with different Li/Nb ratio will be obtained through Czochralski method. Then the 300-nm thick LiNbO3:Pr3+ single-crystal film on SiO2 substrate will be prepared through commercial milling technique from LiNbO3:Pr3+ wafer. This study will provide an understanding of the mechanism of mechanouminescence for LiNbO3:Pr3+ as well as the regulation mechanism of Li/Nb ratio to the luminescence intensity. Moreover, the interaction of piezoelectric effect between ZnO nanorods and LiNbO3:Pr3+ single-crystal film will be understood. After building the function relationship between luminescence intensity and pressure, the tactile sensor for electric skin will be finally achieved with high sensitivity and high resolution.