Microstructure and domain engineering of lithium niobate crystal films for integrated photonic applications.
Microstructure and domain engineering of lithium niobate crystal films for integrated photonic applications.
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用于集成光子应用的铌酸锂晶体薄膜的微观结构和域工程
DOI：
10.1038/s41377-020-00434-0
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发表时间：
2020-12-10
期刊：
影响因子：
--
通讯作者：
Liu H
中科院分区：
文献类型：
--
作者：
Sun D;Zhang Y;Wang D;Song W;Liu X;Pang J;Geng D;Sang Y;Liu H
近年来，集成光子学由于在光通信和量子技术中的广泛应用而引起了人们极大的兴趣。在众多的光子学材料中，锂离子绝缘膜（LNOI）由于其电光和非线性光学特性沿着利用互补金属氧化物半导体（CMOS）兼容的LNOI微结构工程制备的超低损耗、高限制的纳米光子学锂离子波导而成为一种很有前途的光子学平台。此外，铁电畴工程与LNOI上的纳米光子波导相结合正在逐步加速集成非线性光子学的发展，由于其能够与光的量子态的产生，处理和辅助检测相集成，因此将在量子技术中发挥重要作用。本文综述了近年来在集成锂离子光子学（包括光子调制和非线性光子学）中与CMOS兼容的微结构工程和LNOI畴工程的研究进展。我们相信，集成光子学在LNOI上的巨大进步将导致新一代技术的出现。因此，仍然迫切需要适用于大规模和低成本制造集成光子器件和系统的制备LNOI的有效方法。综述了近年来锂氧化物绝缘膜（LNOI）的微结构和畴工程研究进展，认为LNOI是一种很有前途的光子材料，可用于集成非线性光子器件的研究。由山东大学刘红领导的中国研究小组进行的这项研究发现，LNOI的高性能电光和非线性光学特性使其成为集成光子学的理想平台。此外，他们还发现，可以使用当前的制造技术（如互补金属氧化物半导体技术）在LNOI平台上构建光子电路的微结构。研究人员得出的结论是，通过成熟的制造工艺大规模、低成本地制造集成光子器件和系统，可能会导致光通信和量子技术新应用的发展。
Recently, integrated photonics has attracted considerable interest owing to its wide application in optical communication and quantum technologies. Among the numerous photonic materials, lithium niobate film on insulator (LNOI) has become a promising photonic platform owing to its electro-optic and nonlinear optical properties along with ultralow-loss and high-confinement nanophotonic lithium niobate waveguides fabricated by the complementary metal–oxide–semiconductor (CMOS)-compatible microstructure engineering of LNOI. Furthermore, ferroelectric domain engineering in combination with nanophotonic waveguides on LNOI is gradually accelerating the development of integrated nonlinear photonics, which will play an important role in quantum technologies because of its ability to be integrated with the generation, processing, and auxiliary detection of the quantum states of light. Herein, we review the recent progress in CMOS-compatible microstructure engineering and domain engineering of LNOI for integrated lithium niobate photonics involving photonic modulation and nonlinear photonics. We believe that the great progress in integrated photonics on LNOI will lead to a new generation of techniques. Thus, there remains an urgent need for efficient methods for the preparation of LNOI that are suitable for large-scale and low-cost manufacturing of integrated photonic devices and systems. A review of recent progress in the microstructure and domain engineering of lithium niobate film on insulator (LNOI) has concluded that it is a promising photonic material for developing integrated nonlinear photonic devices. The review, conducted by a team of researchers from China and led by Hong Liu from Shandong University, found that the high-performance electro-optic and nonlinear optical properties of LNOI makes it an ideal platform for integrated photonics. Furthermore, they also discovered that the microstructures could be constructed on LNOI platforms for photonic circuits using current manufacturing techniques such as complementary metal–oxide–semiconductor technology. The researchers concluded that the large-scale and low-cost manufacturing of integrated photonic devices and systems by mature manufacturing processes could lead to the development of new applications in optical communication and quantum technologies.
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