应力驱动下的纳米薄膜自组装过程推动着复杂微纳米三维结构器件研究深入开展，具有重要的研究意义和应用价值。本项目的研究对象是应力驱动下的纳米薄膜自组装过程的应力变化过程。研究工作中我们首先研究薄膜制备过程中应力的分布及应力驱动下纳米薄膜的自组装行为，结合同步辐射微区X射线方法，详细研究自组装前后纳米薄膜应力分布变化情况，理清纳米薄膜自组装过程中应力的变化与应力分布、大小及纳米薄膜图形间的相互关系。阐明应力的变化对纳米薄膜本征及宏观物理特性的影响。并以此为基础，从材料的选择和结构优化等方面入手，基于应力驱动下纳米薄膜自组装开展有针对性的特殊三维微纳米结构及特殊物理性质的微纳器件设计制备。本项目的研究成果将从本质上认识纳米薄膜自组装与物理性质变化过程中的应力的关键作用，本项目将为新型三维微纳米结构器件开发奠定坚实的理论和实验基础。

Mechanically driven self-assembly of three-dimensional (3D) micro/nanostructures for advanced functional materials and devices suggests potential application as well as fundamental researches, which enables new opportunities for unusual materials innovation and creative devices. Here we will focus on mechanical engineering and self-assembly of nanomembranes for 3D micro/nanostructures. The stress distributions and transformation for self-assembly will be explored during the 3D micro/nanostructures processes. The nanomembranes’ strain status can influence physical properties and will be investigated by microscale X-ray diffraction of synchrotron radiation. Besides the investigation concerning on the mechanism of mechanical engineering, novel micro/nano-structures (such as wrinkled nanomembranes and rolled-up microtubes) can thus be achieved by means of composition and strain optimizations. The results of this research can help the applications in designing of novel micro/nano-systems, and may suggests one way for the realization of mechanically driven assembly of 3D meso-scale structures from 2D nanomembranes with strategically designed geometries and microscale devices with unique performance.