基于超谐同步共振的高精度MEMS微重力加速度传感器研究

微重力测量对于航空航天、地质勘探以及军事应用等领域有着非常重要的现实意义。目前，传统的微重力测量设备体积庞大、价格昂贵无法满足我国航空航天技术和国民经济发展中对微重力测量的迫切需求，因此，开展高性能微重力加速度传感器的研究迫在眉睫。近期研究表明，基于微型机电系统技术的硅微谐振式加速度传感器在克服其自身在测量精度、稳定性等方面的不足后，有望用于微重力测量。在前期研究的基础上，本项目提出对硅微谐振敏感元件中的同步现象及其在谐振式微重力传感器中的应用进行系统研究，围绕硅微谐振敏感元件的拓扑结构、非线性因素和同步现象三者之间的相互影响规律及其与闭环振荡器性能之间的相关性等科学问题展开研究，旨在揭示硅微谐振敏感元件中产生同步共振现象的动力学规律及其作用机理，探索谐振式传感的新方法和新思路，研制高精度微重力加速度传感器，最终实现高精度的微重力加速度测量。

Microgravimetry plays a significant role in many fields, such as aerospace, geological exploration, military, etc. Due to their large size and expensive price, traditional microgravity measuring equipment can hardly meet the urgent needs of the industry. Therefore, it is very important to carry out the research of microgravity MEMS accelerometer with high accuracy and zero bias stability. In this project, a new sensitivity mechanism based on the synchronization phenomenon between micro-resonators is proposed and will be applied to improve the performance of accelerometers. On the one hand, interrelations among topology of resonators, nonlinear dynamics and synchronization will be studied; on the other hand, accelerometers based on the new sensing mechanism will be developed and applied to actual measurement.