不管是卫星导航等高精尖系统，还是手机等消费电子产品，都离不开精确的时序参考。研究表明，基于微型机械电子系统(MEMS)技术的硅微振荡器在克服了其自身在稳定性等方面的不足后，有望可以代替传统的石英振荡器。目前，硅微振荡器都是工作在谐振器的单一振动模态上。在前期研究成果的基础上，本项目提出对多模耦合硅微谐振器进行研究，深入探索基于谐振器的模态耦合和非线性效应来提高硅微振荡器频率稳定性的新方法和新思路。围绕多模耦合硅微谐振器的拓扑结构设计、加工和测试，模态耦合下非线性效应与硅微振荡器性能的相关性等内容开展系统的研究。旨在揭示硅微谐振器的拓扑结构、模态耦合和非线性效应三者之间的相互影响规律及其与振荡器性能之间的相关性，为开发新型高性能硅微振荡器提供理论和技术支持。

No matter sophisticated systems like the satellite navigation or consumer electronic products like mobile phones, all cannot do without the precise timing reference. Research shows that, microelectromechanical system (MEMS) technology based silicon oscillator is expected to replace the traditional quartz oscillator after overcoming the shortcomings of its performance like stability. At present, silicon oscillator is working at single vibration mode of the resonator. Based on our previous research, this project proposes to study the multi-modes coupled silicon micro resonators, exploring in-depth the new ideas and new methods to improve the frequency stability of silicon oscillator on the base of mode coupling and nonlinear effects of silicon resonators. A systematic study of mode coupled silicon resonator and oscillator will be conducted including the topology design of resonating structure, the microfabrication process, signal transduction methods and device testing, and most importantly, the analysis of nonlinear effects under mode coupling and their influence on the performance of silicon oscillators. It is to reveal the mutual influences among the topological structure, mode coupling and nonlinear effects, the three aspects of our silicon micro resonators, and to clarify the correlation between these effects and the performance of silicon oscillator. This research will provide theoretical and technical support for the development of novel silicon oscillators of high performance.