基于静电修调的准零刚度微加速度计漂移机理与抑制方法研究

“零”刚度加速度计作为理想加速度计，具有极高的加速度检测灵敏度和精度。基于微机电加工和静电修调技术的准零刚度微加速度计是最具发展潜力的“零”刚度加速度计类型之一。为了满足多种应用对高精度高稳定微加速度计的日益增长需求，本课题基于前期提出的静电修调方法和研制的准零刚度微加速度计，继续开展关于静电修调准零刚度微加速度计漂移机理的基础研究，并提出抑制加速度计敏感元件漂移的创新性方法，从而进一步提升加速度计精度和稳定性。具体内容包含：（1）发展新型线性静电刚度修调设计理论，提高刚度修调的线性度与精度，（2）建立机电热耦合力学模型，研究温度与电荷漂移机理以及主导因素和漂移路径，（3）提出基于刚度与标度因数自校准/自补偿的漂移抑制方法，提升对加速度计漂移抑制精度。本课题不仅可以深化该类加速度计关键理论研究，而且为该类高精度高稳定加速度计的实用化奠定基础。

Accelerometers with “zero” stiffness have the ideal form that enables a high sensitivity and accuracy measurement of acceleration. The micromachined accelerometers with electrostatically tuned quasi-zero stiffness are one of the most promising types of “zero” stiffness accelerometers. To fulfil the increasing demand for the micromachined accelerometers with high accuracy and high stability, based on the previous study of the novel electrostatic tuning method and the developed micromachined accelerometers with electrostatically tuned quasi-zero stiffness by the applicant, this project continues the research of the drift mechanisms and the drift suppression methods in order to improve the accuracy and stability of the accelerometers. The project is carried out through (1) the development of the novel linear electrostatic tuning design theory for the improvement of the stiffness tuning linearity and accuracy, (2) the mechanical-electro-thermal coupling modeling for the analysis of the temperature drift and charge drift mechanisms including the dominant cause and the drift path, and (3) the establishment of the drift suppression method based on the self-calibration and self-compensation of both the stiffness and scale factor for the improvement of drift suppression accuracy. This project will not only intensify the researches on fundamental theories of this type of micromachined accelerometers but also construct the essential foundation of the practical applications.