Cr2AlC涂层异质双靶反应高功率脉冲磁控溅射放电特性及低温成相机理

临海航空、船舶舰艇、核电等在海洋重腐蚀环境工作的装备部件受到交变热载荷、氧化、腐蚀等多因素耦合损伤，严重影响整个系统的运行效率和安全性。施加高性能防护涂层是解决这一问题的有效途径。Cr2AlC三元纳米层状材料是MAX相材料的一种，具有优异的耐热腐蚀和抗高温氧化能力，还具有与常用合金材料相近的热物理性能，是潜在的海洋环境用防护涂层材料。然而，结晶温度高，成分区间窄等问题限制了其应用领域。本项目提出借助异质双靶反应高功率脉冲磁控溅射高离化率的技术优势进行Cr2AlC涂层低温制备的新思路，建立时间和空间分辨等离子体原位诊断系统，明晰脉冲放电中电磁场分布和带电粒子的输运特性，阐明内在物理机制。基于对成膜原子扩散能力及其成分的精确控制，实现高纯Cr2AlC MAX相涂层的低温制备，阐明其低温成相机理。研究结果将为拓展高功率脉冲磁控溅射技术应用领域，为设计和发展高性能MAX相涂层提供理论技术支持。

The key parts of aero aviation, ship, and nuclear power that working in marine corrosive environment suffer from coupling damage of many factors such as alternating thermal load, oxidation, and corrosion, which seriously affects the operation efficiency and reliability of the whole system. One of the effective ways to overcome this problem is to utilize high-performance surface protective coatings. Ternary layered Cr2AlC is a typical one of MAX phases, it has excellent high-temperature oxidation and corrosion resistance. In addition, it also possesses matched thermophysical property with common alloys. Therefore, Cr2AlC is very promising to be used as protective coatings at marine environment. However, the high crystallization temperature and narrow composition range in preparing single-phase coatings limit their industry application. To overcome the above-mentioned problems, dual-magnetron reactive high power impulse magnetron sputtering (DMR-HiPIMS) is proposed. A time and space resolved plasma in-situ diagnostic system is to be built to understand the distribution characteristics of electromagnetic field and the transport behavior of charged particles in pulsed discharge, and to further clarify the internal physical mechanism of DMR-HiPIMS. The diffusion ability and content of the film-forming atoms are precisely controlled aiming to achieve high purity Cr2AlC MAX phase coatings at low substrate temperature. The mechanism of low temperature crystallization will be discussed. These results will expand the application area of high power impulse magnetron sputtering and provide theoretical and technical support for the design and development of high performance MAX phase coatings.