整形飞秒激光时空同步聚焦加工硬脆材料方法及应用

项目瞄准高温光纤微传感器及太空望远镜积分场光谱仪瞳镜的国家重大需求核心构件对硬脆材料加工的共性制造挑战，创新地提出飞秒激光时空同步聚焦加工硬脆材料新方法，将飞秒激光时域/空域光场整形和时空同步聚焦结合起来，在保证时/空整形飞秒激光高效率、高质量、并行等加工优势的基础上，解决硬脆材料加工中轴向精度控制和离焦面非线性抑制的瓶颈难题。项目将重点研究飞秒激光时/空同步聚焦光场聚焦/传播特性及其与硬脆材料相互作用的非线性非平衡理论模型，通过对加工中能量吸收、材料相变、组织性能演化的飞秒-皮秒-纳秒-毫秒跨时间尺度观测，揭示整形飞秒激光的时/空同步聚焦加工对硬脆材料形貌、结构、尺度、精度等成形成性调控规律，探索制造新方法并开展其在纯石英光纤高温微传感器和瞳镜微细透镜阵列的加工工艺及应用验证研究，项目将为飞秒激光加工硬脆材料三维复杂结构的广泛应用奠定理论和技术基础。

The project aims at the optical fiber micro-sensor for high-temperature measurement of national defense equipment, pupil microlens of space telescope integral field spectrometer and other manufacturing challenges in the processing of hard brittle material in the key structures used in national great strategic demands, and innovatively proposes a new method for processing hard brittle materials by simultaneous spatial and temporal focusing of femtosecond laser. On the basis of ensuring high-efficiency, high-quality, parallel and other processing advantages of temporally/ spatially shaping femtosecond laser pulses, the new method combines the temporally/ spatially shaping of light field with simultaneous spatial and temporal focusing to solve the bottleneck problems of controlling axial precision and suppression nonlinear effect of defocusing planes in hard brittle materials processing. The project will focus on the focusing/ propagation characteristics of the femtosecond laser pulses simultaneous spatial and temporal focusing and its nonlinear and nonequilibrium theoretical model of femtosecond laser hard brittle materials interactions. Through the framework of femtosecond-picosecond-nanosecond-microsecond-second multi-timescale detection of energy absorption, material phase transition, and tissue characteristics evolution during processing, the formation controlling law on morphology, structure, scale and precision of hard brittle materials in the processing of shaped femtosecond laser pulses simultaneous spatial and temporal focusing will be revealed. In this project, the new fabrication method will be explored and its processing technology and application verification in processing pure quartz optical fiber high temperature micro-sensors and pupil microlens array will also be carried out. The project will establish the theoretical and technical foundation for the wide application of three-dimensional complex structures of femtosecond laser processing hard brittle materials.