面向超表面制备的空间整形超快激光金属微纳结构大面积高质量加工

超表面是近些年迅速发展起来的一个前沿研究领域，在雷达天线、电磁隐身、全息三维显示等方面展现了巨大应用潜力。阻碍超表面实用化的核心瓶颈问题是如何大幅面尺寸下实现空间复杂排布的高质量金属微纳结构表面形貌精细控制。本项目在前期研究成果的基础上创新性地提出基于空间整形超快激光单脉冲直接在金属薄膜材料上并行面投影曝光结合串行飞行式扫描拼接加工大面积高质量金属微纳结构的新方法新工艺。项目将重点研究空间整形超快激光与金属薄膜材料相互作用的理论模型；通过对加工过程中多尺度时间分辨在线观测，揭示金属薄膜材料在空间整形超快激光作用下能量吸收、传递、转换及结构成形成性规律；基于空间整形超快激光并行面投影曝光结合串行飞行式扫描拼接方法在金属薄膜材料上实现大面积高质量超表面加工并展示其功能性应用。本项目将为发展大面积高精度的超快激光微纳加工新方法奠定理论和技术基础，为超快激光微纳加工技术的广泛应用做出贡献。

Metasurfaces, a frontier research area developed in recent years, have shown high potential for various applications ranging from radar antennas, electromagnetic cloaking, to holographic 3D display. The fine control of surface morphologies on metalsurfaces in large-area with programmable arrangement is a critical issue in practical application of metasurfaces. Based on our previous research, the project proposes a novel method for large-area, high-quality metasurfaces fabrication by spatially shaping single ultrafast laser pulse combined the serial time-of-flight scanning technique on the surface of a thin metal film, which can be artificially programmed in the specific area. The project will: (i)model the interaction of spatial shaped ultrafast laser with the metal thin film; (ii) reveal the energy absorption, transmission, transformation and surface formation on the metal thin film irradiated by the spatially shaped ultrafast laser, based on the multi-scale time-resolved online observation platform; (iii)achieve the novel method for large-area metasurfaces fabrication by spatial shaping single ultrafast laser pulse combined the serial time-of-flight scanning technique on the surface of thin metal film material; and (iv)explore the fabricated metasurface’s functional applications. The project will establish a theoretical and technical foundation for the development of large-area, high precision ultrafast laser micro/nano fabrication methods and contribute a lot to the widespread industrialization of ultrafast laser micro/nano fabrication technique in our country.