面向燃烧脉动测量的温压双参数原位传感技术基础研究

燃烧脉动的温度和压力参数原位动态测试对在航空发动机和超高速度飞行器等装备的燃烧不稳定过程研究中具有重要意义。目前，航空发动机燃烧室温度超过1700℃，高速飞行器超音速飞行时，表面最高温度超过1500℃，高频燃烧脉动超过4kHz。目前，非接触激光测量可以耐高温，但是不能实现高频原位测试，传统的接触式原位测试无法满足耐高温需求。针对高温环境下的敏感元件动力学特性，传感器热应力匹配，以及压力和温度参数信号串扰等科学问题，本项目提出了基于MEMS技术的氧化镁原位温压敏感单元结合远程光学干涉测量创新性新思路。通过研究温压双参数敏感器件设计、氧化镁MEMS加工工艺，高频（100kHz）非扫描式相关解调系统、温度压力关系补偿方法等内容，解决2000℃高温下的温度和压力双参数原位动态测试难题。在此基础上，在燃烧脉动测量领域进行验证，为航空航天发动机和超高速度飞行器等高温下的力学测试奠定技术基础。

The in-situ dynamic measurement of combustion pulsation temperature and pressure are of great significance in the fields of combustion instability processes of aircraft engines and ultrahigh speed aircraft. At present, the temperature of the aero-engine combustion chamber can exceed 1700℃, and when the high-speed aircraft supersonic flight, its maximum surface temperature reaches 1500℃, and the high-frequency combustion pulsation exceeds 4 kHz. In addition, non-contact laser measurement with the advantage of high-temperature resist, but high-frequency in-situ testing cannot be achieved, while traditional in-situ contact measurement cannot meet the high-temperature requirement. In view of the dynamic characteristics of the sensitive components in high temperature environment, thermal stress matching of the sensors, and the interference signal crosstalk of pressure and temperature, this project proposed a novel sensing technique to achieve temperature and pressure in-situ measurements, it is based on MgO MEMS technology and fiber-optic Fabry-Perot interferometry. This project proposed a new innovative idea of MgO MEMS-based technique temperature and pressure in-situ sensing unit combined with remote optical interferometry. Through the study on the design of temperature and pressure dual-parameter sensitive device, MgO MEMS processing technology, high-frequency (100 kHz) non-scanning correlation demodulation algorithm, temperature and pressure relationship compensation matrix, etc. the problem of two-parameter in-situ dynamic measurement of temperature and pressure in high temperature environment of 2000℃ can be solved. On this basis, verification in the field of combustion pulsation measurement lays a technical foundation for mechanical testing at high temperatures such as aerospace engines and ultra-high-speed aircraft.