室温下利用原子的独特特性构筑具有新颖功能的原子器件是克服现有器件尺寸、工艺极限，研制下一代新型器件的重要途径。申请人提出了在室温下对硅半单胞内单个银原子运动行为实现非接触式可逆调控及构筑运算器件的思路，通过扫描隧道显微镜针尖改变金属原子在硅表面的扩散势垒操纵金属原子运动，建立针尖作用点、针尖下降速度、针尖与硅表面高度对扩散势垒调控的本构关系，理解能垒调控机制；利用针尖操纵金属原子在硅表面上的运动，构成金属原子团簇及阵列，通过金属团簇或阵列与单个银原子间的相互作用对银原子运动行为实现非接触式可逆调控，明确金属团簇类型、尺寸和原子阵列类型对银原子运动行为的影响，理解硅表面银原子运动行为调控的机制；明确硅表面单个银原子的运动行为与金属原子阵列类型的关联性，构筑比较运算器件。这一基础研究有助于在原子水平上理解单原子运动行为及其变化的基本问题，为设计新型基于原子调控的纳米器件和量子器件奠定基础。

At room temperature, using the rich intrinsic properties of atoms to build new types of device with novel functions is an important way to the promotion of electronic devices miniaturization at the nanometer scale. In this project, we propose to non-contact controll intracell diffusion of Ag monomer on Si surface at room temperature and the construction of arithmetic device with the assistance of scanning tunneling microscopy(STM). The diffusion barrier of metal atom in half silicon unit cell can be well adjusted by STM tip. The dependence of manipulation probability on the descent speed of tip and the distance between the tip and the Si surface will be deduced from a series of manipulation experiments to understand the mechanism of atomic movement. Intracell diffusion of silver monomer on Si(111) surface will be non-contact reversible controlled by metal clusters and metal atomic array constructed in the neighbored half silicon unit cell through manipulating metal atoms with STM tip. The influence of the type of metal, the type of atomic array to the intracell diffusion of silver monomers will be systematically investigated to understand the interaction between the metal clusters(atomic array) and the silver atom. The corresponding relationship between metal atomic array and the adsorption morphology of silver atom in the half silicon is established and the arithmetic device will be constructed through non-contact controlling intracell diffusion of Ag monomer on Si surface at room temperature. The performance of this project is helpful to choose suitable atom/solid system for construction of nanometer devices working at room temperature and also can be useful to understand atomic motion behavior at single atomic level to design new type nanometer devices with novel functions.