Additive fabrication of nanostructures with focused soft X-rays

Additive fabrication of nanostructures with focused soft X-rays
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使用聚焦软 X 射线增材制造纳米结构

DOI:
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发表时间:
2016
期刊:
影响因子:
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通讯作者:
H. Marbach
H. Marbach
中科院分区:
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文献类型:
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作者:
A. Späth;Fan Tu;F. Vollnhals;Martin Drost;S. Calderon;B. Watts;R. Fink;H. Marbach

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我们报告了一种新的技术,用于制造金属纳米结构,通过软X射线照射的前体分子提供的气相。用这种技术,我们能够产生本地化的Co纳米结构的生长速度和纯度与电子束诱导沉积竞争。我们证明,我们的方法表现出显着的选择性,相对于入射光子能量导致增强的前体分子的共振吸收能量的增长。基于这一发现,我们提出了一个独特的新途径,从前体混合物的选择性沉积。此外,我们研究了生长速率与前体压力和生长时间,并讨论了这种新技术的潜在分辨率限制。
We report on a novel technique for the fabrication of metallic nanostructures via soft X-ray irradiation of precursor molecules supplied from the gas phase. With this technique we were able to produce localized Co nanostructures with a growth rate and purity competitive with electron beam induced deposition. We demonstrate that our approach exhibits significant selectivity with respect to incident photon energy leading to enhanced growth for resonant absorption energy of the precursor molecule. Based on this finding we propose a unique new pathway of selective deposition from precursor mixtures. Furthermore, we investigated the growth rate with respect to precursor pressure and growth time and discuss the potential resolution limits of this new technique.
DOI: 10.3762/bjnano.5.129
发表时间: 2014
影响因子: 3.1
作者:
Vollnhals F;Drost M;Tu F;Carrasco E;Späth A;Fink RH;Steinrück HP;Marbach H
通讯作者: Marbach H
DOI: 10.1007/s00339-014-8578-x
发表时间: 2014-11-01
影响因子: 2.7
作者:
Marbach, Hubertus
通讯作者: Marbach, Hubertus
DOI: 10.3762/bjnano.6.109
发表时间: 2015
影响因子: 3.1
作者:
Dobrovolskiy OV;Kompaniiets M;Sachser R;Porrati F;Gspan C;Plank H;Huth M
通讯作者: Huth M