Switch on, switch off: stiction in nanoelectromechanical switches
Switch on, switch off: stiction in nanoelectromechanical switches
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打开、关闭：纳米机电开关中的粘滞
DOI：
10.1088/0957-4484/24/27/275501
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发表时间：
2013
期刊：
影响因子：
3.5
通讯作者：
D. Vella
中科院分区：
文献类型：
--
作者：
T. Wagner;D. Vella
本文对纳米机电触点开关的粘性进行了理论研究。我们开发了一个数学模型来描述在静电和范德华力的作用下悬臂梁的挠度。特别关注的问题是，即使静电力被移除，粘附范德华力是否会导致悬臂梁保持在“开”状态。与以前的研究相反，我们的理论考虑了大斜率的偏转（即几何非线性）。我们通过数值求解得到的方程来研究悬臂梁如何附着在刚性电极上：在“自由”、“固定”和“夹紧”状态之间的转换显示为不连续的，并表现出显著的滞后。我们的研究结果与先前线性化模型的结果进行了比较，并讨论了纳米机电悬臂开关设计的意义。
We present a theoretical investigation of stiction in nanoscale electromechanical contact switches. We develop a mathematical model to describe the deflection of a cantilever beam in response to both electrostatic and van der Waals forces. Particular focus is given to the question of whether adhesive van der Waals forces cause the cantilever to remain in the ‘ON’ state even when the electrostatic forces are removed. In contrast to previous studies, our theory accounts for deflections with large slopes (i.e. geometrically nonlinear). We solve the resulting equations numerically to study how a cantilever beam adheres to a rigid electrode: transitions between ‘free’, ‘pinned’ and ‘clamped’ states are shown to be discontinuous and to exhibit significant hysteresis. Our findings are compared to previous results from linearized models and the implications for nanoelectromechanical cantilever switch design are discussed.
影响因子：
13.3
作者：
O. Loh;Xiaoding Wei;C. Ke;J. Sullivan;H. Espinosa
通讯作者：
O. Loh;Xiaoding Wei;C. Ke;J. Sullivan;H. Espinosa