Improved control of electron computer-generated holographic grating groove profiles using ion beam gas-assisted etching.
Improved control of electron computer-generated holographic grating groove profiles using ion beam gas-assisted etching.
复制标题
使用离子束气体辅助蚀刻改进对电子计算机生成的全息光栅凹槽轮廓的控制。
作者：
Cameron W. Johnson;Dylan H. Bauer;B. McMorran
在透射电子显微镜中，电子被描述为波长比光学电磁波小五个数量级的物质波。类似于光学全息术，电子波阵面可以使用纳米级全息光栅成形。在这里，我们展示了一种新颖的，可扩展的纳米制造方法，用于创建离轴全息光栅，表现出接近理想的衍射效率的二进制，正弦曲线，和闪耀光栅槽轮廓。我们表明，这种方法可以产生高达50微米的直径面积光栅，其中68%的透射电子波进入所需的衍射级，小于7%进入任何其他顺序。此外，我们发现，从材料光栅的非弹性散射的电子的量留在从光栅的相干衍射级是可以忽略不计的远场。
In a transmission electron microscope, electrons are described by matter-waves with wavelengths five orders of magnitude smaller than optical electromagnetic waves. Analogous to optical holography, electron wavefronts can be shaped using nanoscale holographic gratings. Here we demonstrate a novel, scalable nanofabrication method for creating off-axis holographic gratings that demonstrate near ideal diffraction efficiencies for binary, sinusoidal, and blazed grating groove profiles. We show that this method can produce up to 50 µm diameter area gratings that diffract up to 68% of the transmitted electron wave into a desired diffraction order with less than 7% into any other order. Additionally, we find that the amount of inelastically scattered electrons from the material gratings remaining in the coherent diffraction orders from the gratings is negligible in the far field.
影响因子：
44.1
作者：
Lloyd, S. M.;Babiker, M.;Yuan, J.
通讯作者：
Yuan, J.