Development of Superconducting Multilayer Wiring for a 400-Pixel TES X-ray Microcalorimeter Array
Development of Superconducting Multilayer Wiring for a 400-Pixel TES X-ray Microcalorimeter Array
复制标题
400像素TES X射线微量热仪阵列超导多层布线的开发
DOI：
10.1109/tasc.2012.2231712
复制
发表时间：
2013
影响因子：
1.8
通讯作者：
K. Tanaka
中科院分区：
文献类型：
--
作者：
Y. Ezoe;S. Oishi;S. Yamada;Y. Enokijima;N. Iijima;R. Toba;Y. Ishisaki;T. Ohashi;K. Mitsuda;T. Morooka;K. Tanaka
针对未来的天体物理任务，如DIOS的过渡边缘传感器的大阵列，我们一直在开发多层读出布线。由Al制成的超导信号和返回线夹有SiO2绝缘层。通过这种方法，自感和互感被最小化，并且可以减少偏置引线的自屏蔽。我们在多层布线上制作了一个20 × 20的过渡边缘传感器（TES）阵列。测试了一系列TES制造工艺，包括吸收剂沉积和膜形成。然而，在室温下的电阻测量表明工艺产率不高（~ 50%）。在低温下，正常的TES像素出现了急剧的超导转变，但其剩余电阻较高（> 10 mΩ），临界电流较低（<10 μA）。这些现象的原因和未来TES阵列制造的计划进行了讨论。
Aiming at a large array of transition edge sensors for future astrophysical missions such as DIOS, we have been developing a multilayer readout wiring. Superconducting signal and return lines made of Al sandwich a SiO2 insulation layer. With this approach, self and mutual inductances are minimized and self fielding of bias leads can be reduced. We fabricated a 20 × 20 transition-edge sensor (TES) array on the multilayer wiring. A series of TES fabrication processes including absorber deposition and membrane formation were tested. However, resistance measurements at room temperature suggest that process yield is not high (~50 %). At low temperature, sharp superconducting transitions were observed for normal TES pixels, while their residual resistances were high (>;10 mΩ) and the critical currents were low (<;10 μA). Reasons for these phenomena and plans for a future TES array fabrication are discussed.
大型 TES X 射线微量热仪阵列多层读出线路的开发
影响因子：
1.8
作者：
Ezoe;Yuichiro; Ishisaki;Yoshitaka; Oishi;Shihoko; Abe;Yuki; Ohashi;Takaya; Yoshitake;Hiroshi; Sekiya;Norio; Mitsuda;Kazuhisa; Morooka;Toshimitsu; Tanaka;Keiichi
通讯作者：
Keiichi