Simultaneous estimation of thickness and refractive index of layered gradient refractive index optics using a hybrid confocal-scan swept-source optical coherence tomography system.
Simultaneous estimation of thickness and refractive index of layered gradient refractive index optics using a hybrid confocal-scan swept-source optical coherence tomography system.
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使用混合共焦扫描扫频光学相干断层扫描系统同时估计分层梯度折射率光学器件的厚度和折射率。
DOI：
10.1364/oe.23.030149
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发表时间：
2015
期刊：
影响因子：
3.8
通讯作者：
J. Rolland
中科院分区：
文献类型：
--
作者：
Jianing Yao;Jinxin Huang;P. Meemon;M. Ponting;J. Rolland
设计了一种混合共焦扫描扫描源光学相干层析成像测量系统，用于同时测量聚合物层状梯度折射率（GRIN）光学器件的折射率和厚度分布。不确定度分析预测了系统的计量能力，并指导了最佳工作数值孔径的选择。在单片和GRIN层状片上的实验结果与理论预测非常吻合。测量2.8 mm和~300µm厚层时，指标测量精度分别达到0.0001和0.0008。同时测量这些层的厚度，精度分别为0.28µm和0.17µm。
A hybrid confocal-scan swept-source optical coherence tomography metrology system was conceived for simultaneous measurements of the refractive index and thickness profiles of polymeric layered gradient refractive index (GRIN) optics. An uncertainty analysis predicts the metrology capability of the system and guides the selection of an optimum working numerical aperture. Experimental results on both a monolithic and a GRIN layered sheet are demonstrated to be in close agreement with theoretical predictions. Index measurement precision reached 0.0001 and 0.0008 for measuring 2.8 mm and ~300 µm thick layers, respectively. The thicknesses of these layers were simultaneously measured with a precision of 0.28 and 0.17 µm, respectively.
影响因子：
82.9
作者：
Drexler, W;Morgner, U;Fujimoto, JG
通讯作者：
Fujimoto, JG