Investigations on High Brightness Gaseous Field Ion Sources

PI已经开发出一种H(2)+气态场离子源，它能产生高度柱状的高角电流密度和低能量扩散的离子束。PI建议将气态场离子源扩展到使用不同气体的其他几个离子物种。这些特性将被用来确定使用氦的气体源所需的温度、气压、场等条件，将研究稀有气体0(2)、N(2)和一些气态氢化物，如硅烷(SiH(4))、磷化氢(PH(3))、砷(灰分(3))和二硼烷(B(2)H(6))。

The PI has developed an H(2)+ gaseous field ion source that produces a highly columnated ion beam of high angular current density and low energy spread. The PI proposes to extend the gaseous field ion source to several other ion species using different gases. The characteristics will be used to determine the required conditions of temperture, gas pressure, fields, etc. for gaseous sources using helium, the rare gases, 0(2), N(2), and some gaseous hydride, e.g. silane (SiH(4)), phosphine (PH(3)), Arsine (AsH(3)) and diborane (B(2)H(6)) will be investigated.