A New Technique Combining Boundary Integral Equation and Hybrid Ray-Mode Method for Wave Scatters in Layered Background with Applications in Optical Microscopy

这项工作是作为一个工程启动奖（EIA）资助。 多层介质中散射体的光波散射现象 背景将使用一种新的技术进行研究， 积分方程，以制定相互作用过程和混合射线- 模式方法提供背景的绿色函数。 这 该方法在很宽的参数范围内是数值有效的 同时也为计算结果提供了有力的物理解释 结果.集成光学显微镜中感兴趣的结构 电路和集成光学将作为测试案例。 依赖性 的形状，大小和电介质上的散射特性 散射常数和扫描显微镜的响应 将研究散射场。 结果从 这项研究可能使扫描显微镜能够评估 数量上的物体，其尺寸大约是，或更少 波长。 潜在的应用是使用扫描 自动无损评价用光学显微镜， 集成电路中亚微米结构的检测， 集成光学器件这项研究也将有益于其他 工程学科，如无损检测，勘探， 物理学和水声学等，类似的结构 使用弹性波和声波进行研究。 将采用一种新的理论方法来研究波 这些结构的散射现象是感兴趣的扫描 集成电路和集成光学的光学显微镜。 等 结构由形成在层中的材料组成， 嵌入的不均匀性，不同于背景分层 结构 一个最通用的方法来识别和评估 它们是基于使用传输和散射有界 入射到多层结构上的光束在多层结构上扫描， 包含散射的区域。 为了利用分散的磁场 识别散射的属性，必须解决 多层介质中物体对波散射的正问题 结构 该建议涉及边界组合的使用 积分方程和新发展的混合射线模式方法， 解决波散射问题。

This work is funded as an Engineering Initiation Award (EIA). Optical wave scattering phenomena for scatters embedded in a multilayer background will be studied using a new technique which employs boundary integral equation to formulate the interaction processes and hybrid ray- mode method to provide the Green's function of the background. This method is numerically efficient in a broad range of parameter regimes and also provides cogent physical interpretations for the computed result. Structures of interest in the optical microscopy of integrated circuits and integrated optics will serve as test cases. The dependance of the scattering properties on the shapes, sizes and dielectric constants of the scatters and the response of the scanning microscope to the scattering fields are to be investigated. The results gained from this research may enable the scanning microscopy to assess quantitatively objects whose dimensions are on the order of, or less than, the wavelength. Potential application is to the use of a scanning optical microscope for automated nondestructive evaluation and inspection of sub-micron structures in integrated circuits and integrated optics devices. This study will be also beneficial to other engineering disciplines such as nondestructive testing, exploration, geophysics and underwater acoustics, etc., where similar structures are investigated using elastic and acoustic waves. A new theoretical technique will be employed to study wave scattering phenomena of those structures that are of interest in scanned optical microscopy of integrated circuits and integrated optics. Such structures are composed of material formed in layers which often have embedded inhomogeneities, different from the background layered structure. One of the most versatile methods to identify and evaluate them is based on the use of the transmission and scattering bounded beams incident on the multilayered structure that are scanned over the region containing the scatter. In order to use the scattered fields to identify the properties of the scatter, it is essential to solve the direct problem of wave scattering by an object in a multilayer structure. This proposal addresses a use of the combination of boundary integral equation and the newly developed hybrid ray-mode method to solve the wave scattering problem.