Engineering Research Equipment Grant: Scanning Tunneling Microscope for Materials Research

将建立一台扫描隧道显微镜装置，以研究(1)光滑超薄金属膜的形成，(2)纳米级直写，(3)催化过程中金属表面的重组。该装置将用于纳米直径金属团簇、团束沉积过程、化学气相沉积和超薄膜生产等一系列研究项目。该项目在制造微电子、高质量光学反射镜和高密度数字存储器方面具有重要的技术应用。

A scanning tunneling microscope facility will be established to study (1) the formation of smooth ultrathin metal films, (2) nanometer scale direct writing, and (3) restructuring on metal surfaces during catalysis. The facility will be used for a series of research projects on nanometer diameter metal clusters, cluster-beam-deposition process, chemical vapor deposition, and production of ultrathin films. The project has important technological applications in the fabrication of microelectronics, high quality optical mirrors and high density digital memories.