Combination Effluent Scrubber/Heat Recovery System for Semiconductor Processes

开发一种简单、高效、非化学特异性的 污水处理系统将有巨大的好处， 半导体加工业。 该洗涤器在 这个SBIR项目将从反应器中去除反应副产物， 工艺废气冷凝到低温冷却器上 表面。 一旦冷凝成液体或固体，废物将 机械分离，无害材料将被 释放出来的有毒物质会被焚烧，灰烬 收集用于危险废物处置。 研究的第二个目的是检查 以液氮为工质的可行性 热引擎的流体，以提取废热作为工作， 气流 这项研究的最终目标将是 商业系统，它将过滤空气，分离出 从氮气中分离氧气，冷凝，然后焚烧， 工业废水中的废物， 焚烧，并使用由此收集的能量来焚烧 更多的空气。 这样的系统很可能能够产生过剩的 能源，以及减少有毒废物的排放。

The development of a simple, efficient, nonchemistry-specific effluent treatment system would be of tremendous benefit to the semiconductor process industry. The scrubber proposed in this SBIR project would remove reaction by-products from the process exhaust by condensation onto cryogenically cooled surfaces. Once condensed as liquid or solid, the waste would be separated mechanically, nonhazardous material would be released, toxic material would be incinerated, and the ash collected for hazardous waste disposal. A secondary objective of the research is to examine the feasibility of using the (liquid) nitrogen as the working fluid of a heat engine, to extract waste heat as work from the gas stream. The final goal of the research will be a commercial system which will liquefy air, separate out the oxygen from the nitrogen, condense and then incinerate the waste from industrial effluent, condense the waste from the incineration, and use the energy thus collected to liquefy more air. Such a system may well be able to generate excess energy, as well as decrease toxic waste emissions.