Energy Pathways in Solids

该项目是一项大学与工业联合开展的研究，研究电子能量从keV到MeV离子或10 eV到keV电子轰击固体中的能量耗散过程。在沉积的激发态能量扩散和电子发射之后，那些没有被熄灭的激发通过发射光子或通过非辐射过程而衰变，例如分子固体中化学键的断裂和显著的原子运动的产生。探测被抛出的原子、分子、电子、离子和光子的实验以及对被轰击固体的红外研究将被用来建立能量沉积的模型。理论和模型也是该项目的一部分。这些结果在金属表面沉积和微电子工业中依靠离子束光刻方法的工艺中都有应用。

This project is a university-industry investigation of energy dissipation processes in solids which are bombarded by keV to MeV ions or 10 eV to keV electrons. After the diffusion of the deposited excited state energy and the emission of electrons, those excitations that have not been quenched decay by the emission of photons or by non-radiative processes such as the breaking of chemical bonds in a molecular solid and the production of significant atomic motions. Experiments that detect ejected atoms, molecules, electrons, ions and photons as well as IR studies of the bombarded solids, will be used to develop models for the energy deposition. Theory and modeling are also part of the project. The results have applications in the deposition of metals on surfaces and on processes in the microelectronics industry depending on ion beam lithographic methods.