Development of SPEAR for Ultra-High Vacuum-High Resolution Electron Microscope

该项目的仪器开发将提供组件 一个多室的表面科学系统， 超高真空高分辨电子显微镜. 西北大学材料基础研究 表面。 对薄膜生长、气体相互作用的独特研究 与表面、基础表面科学和埋藏界面 传统的表面科学和 高分辨率电子显微镜将能够与此 仪器 基本思路是从单一的、有限的 将腔室转移到一组互连的腔室，每个腔室 专攻不同的技术 所得 该系统将由四个腔室和一个小型气闸样品组成 入口系统和中央转移容器。 这个项目 几个目标：在超高真空下储存样品， 可进行沉积或气体处理的腔室， 有小探头成像设备可用，有良好的化学 分析. 该项目结合了电子显微镜和表面 科学和薄膜技术。 研究项目将重点 基础薄膜研究，表面和催化，以及 晶界研究，涉及西北大学的几个小组， 与国家实验室和工业界的合作。//

This project for instrument development will provide components for a multichamber surface science system that will be attached to an ultra-high vacuum high resolution electron microscope at Northwestern University for the fundamental study of material surfaces. Unique studies of film growth, interactions of gases with surfaces, fundamental surface science, and buried interface problems with a true marriage of traditional surface science and high resolution electron microscopy will be capable with this instrument. The basic idea is to change from a single, limited transfer chamber to a set of interconnected chambers, each specializing in a different set of techniques. The resulting system will consist of four chambers with a small airlock specimen entry system and a central transfer vessel. This project has several goals: to store samples under UHV, to have separate chambers where deposition or gas treatments can be performed, to have small probe imaging equipment available, to have good chemical analysis. The project combines electron microscopy with surface science and thin films technology. Research projects will focus on fundamental thin film research, surfaces and catalysis, and grain boundary studies, involving several groups at Northwestern, collaborations with National Laboratories, and industry. //