Acquisition of a 200keV Analytical Field Emission Transmission Electron Microscope

高分辨电子显微镜是一种对几乎所有固态材料进行表征的关键技术。将安装在佐治亚理工学院微电子研究中心的200keV日立HF-2000场发射分析传输电子显微镜是一种尖端仪器，它结合了最先进的高分辨率能力和出色的分析能力。在过去的十年里，多学科材料研究已经成为佐治亚理工学院研究和教育的高度优先领域。然而，缺乏这样的仪器一直是当前和计划中的材料研究计划的广度和深度的主要限制因素。提供这一现代化的研究级透射电子显微镜将促进对广泛的材料系统和结构进行重大研究。它将在整个研究所提供，并在四个不同级别上使用：(A)由负责操作、培训和与教员国际合作进行研究的长期专业显微镜人员；(B)要求将透射电子显微镜作为其研究中心部分的长期学生显微镜人员；(C)用于教育和数据获取目的的短期学生用户；以及(D)作为一项服务，向PI和学生提供必要的研究数据。

High resolution transmission electron microscopy (TEM) is a technique critical to the characterization of nearly all solid state materials. The 200 kev Hitachi HF-2000 field emission, analytical transmission electron microcope to be installed at the Microelectronics Research Center at Georgia Institute of Technology is a cutting edge instrument that combines state-of-the-art high- resolution capabilities with excellent analytical capabilities. Multidisciplinary materials research has emerged as a high-priority area of emphasis of both research and education at Georgia Institute of Technology over the past decade. Lack of such an instrument however has been a major limiting factor in the breadth and depth of the current and planned materials research program. Provision of this modern, research-grade TEM will facilitate the conduct of major research studies on a broad range of materials systems and structures. It will be made available throughout the Institute and utilized at four different levels: (a) by long-term professional microscopists responsible for operation, training, and collaborative research with faculty PI's; (b) by long-term student microscopists requiring TEM as a central part of their research; (c) by short-term student users for educational as well as data acquisition purposes; and (d) as a service to provide essential research data to PI's and students.