Wavelength Stabilized Laser Diode Sources for Distance Measuring Interferometers

这项研究项目将研究用于测距干涉仪或相关设备的激光二极管的波长稳定。该计划的长期效益将是一种用于精密机床、半导体制造设备、精密计量和实验室测量的低成本线性距离测量干涉仪。研究了一种基于半导体激光器温度控制的稳频技术。温度由连接的热电(TE)冷却器控制，改变激光二极管的注入电流，或两者兼而有之。如果要获得大于粗略的波长稳定性，这种方法需要外部干涉仪根据波长漂移产生控制信号。在测距干涉仪中，这种控制信号只需很少的额外工作即可获得。这项研究计划的成功完成将使波长稳定光源用于紧凑和低成本的线性测距干涉仪，该干涉仪可以在与玻璃秤相同的市场上竞争，以及目前基于氦-霓虹灯的线性测距干涉仪服务的许多市场。

This research project will investigate wavelength stabilization of a laser diode for use in a distance measuring interferometer or related device. The long range benefits of this program will be a low cost linear distance measuring interferometer for use in precision machine tools, semiconductor manufacturing equipment, precision metrology and laboratory measurements. A stabilization technique based upon temperature control of the laser diode will be researched. The temperature is controlled either by an attached thermoelectric (TE) cooler, varying the injection current to the laser diode or both. This approach requires an external interferometer to develop a control signal based upon wavelength drift if more than crude wavelength stability is to be obtained. In a distance measuring interferometer, this control signal can be obtained with little additional effort. Successful completion of this research program will result in a wavelength stabilized source for use in a compact and low cost linear distance measuring interferometer which can compete in the same markets as glass scales as well as many markets currently served by helium-neon based linear distance measuring interferometer.