A New Method of Synthesis for Micro-Electro-Mechanical Systems in a Single Phase: From Function and Fabrication

9313330科塔 本项目介绍了一类新型的机械系统，称为顺应机制的微型应用。 柔顺机构是单件柔性结构，其通过经历弹性变形来传递期望的运动，而不是传统机构的刚体运动。 因此，该项目的主要目标是探索在微领域使用顺应机制的可能性，以满足微机电系统（MEMS）所带来的非典型设计挑战。 MEMS的研究是一个快速增长的研究领域，具有巨大的潜力，可以帮助在涉及微观机械操作的众多应用中完成有用的任务。 该项目涉及此类系统的设计方面。 许多研究人员已经通过构建各种微机械元件来证明他们的微制造技术的可行性。它们包括旋转电机、线性致动器和谐振器、弹簧、夹具和齿轮，所有这些都在几十微米到几百微米的尺寸范围内。 微机械加工技术的有限能力让位于在微观水平上制造和设计的新要求，这些要求在宏观机械中是不存在的。

9313330 Kota This project introduces a novel class of mechanical systems called compliant mechanisms for micro applications. Compliant mechanisms are single-piece flexible structures that deliver the desired motion by undergoing elastic deformation as opposed to the rigid body motions of conventional mechanisms. Thus, the principal objective of the project is to explore the possibility of using compliant mechanisms in the micro realm to meet the atypical design challenges posed by Microelectromechanical systems (MEMS). The study of MEMS is a fast growing area of research that has an immense potential to help accomplish useful tasks in numerous applications that involve mechanical manipulation at the micro level. This project addresses the design aspects of such systems. Many researchers have demonstrated the feasibility of their microfabrication technologies by building a variety of micromechanical elements. They include rotary motors, linear actuators and resonators, springs, grippers and gears all of which are in the size range of few tens of microns to few hundreds of microns. The limited capabilities of the micromachining techniques give way to new exigencies in fabrication and design at micro level that are nonexistent in the macro machinery.