Synthesis and Characterization of Carbon Nitride Films for Tribological Applications

有人提出一种假想的晶体材料B- C3N4可能比金刚石更硬，具有优异的耐磨损和耐腐蚀性能，并且具有极低的摩擦系数。目前还没有人成功地合成出连续的结晶氮化碳薄膜。这样的成就将是一个技术上的里程碑。超硬B- C3N4的可用性，以附着物的形式，固体润滑剂涂层将使摩擦学取得重大进展。我们提出的创新是通过双离子束辅助沉积（DIBAD）合成亚稳，晶体氮化碳薄膜。DIBAD工艺已成功地用于合成立方氮化硼等亚稳材料。它也为成功生长B-C3N4薄膜提供了相当大的希望。成功合成的关键是每个到达的原子将动量转移到薄膜中。DIBAD提供了比单一离子束蒸发过程更宽的操作窗口。在第一阶段，我们将展示DIBAD工艺生长化学计量和近化学计量B-C3N4连续膜的可行性。将定义沉积条件，并根据其组成，形态，密度，结构，热稳定性，附着力和摩擦学性能来表征薄膜。＊＊＊

9360118 Stark It has been suggested that a hypothetical crystalline material, B- C3N4, may be harder than diamond, provide exceptional wear and corrosion resistance, and exhibit an extremely low coefficient of friction. No one yet has successfully synthesized continuous films of crystalline carbon nitride. Such an achievement would represent a technical milestone. The availability of superhard B- C3N4 in the form of an adherent, solid lubricant coating would permit significant advances to be made in tribology. The innovation we propose is the synthesis of metastable, crystalline carbon nitride films by dual ion beam assisted deposition (DIBAD). The DIBAD process has been used successfully to synthesize metastable materials such as cubic boron nitride. It also offers considerable promise for successfully growing films of B-C3N4. The key to successful synthesis is momentum transfer into the films per arriving atom. DIBAD provides a wider window of operation than does a single ion beam evaporation process. In phase 1, we will demonstrate the feasibility of growing continuous films of stoichiometric and near-stoichiometric B-C3N4 by the DIBAD process. Deposition conditions will be defined and the films characterized in terms of their composition, morphology, density, structure, thermal stability, adhesion and tribological properties. ***