Research Equipment for Development of High Speed Ultra Accurate Motors and Robotic Systems for Advanced Manufacturing Applications (ARI/MME)

这项研究为研究设备提供了资金，用于开发用于先进制造应用的高速、超精确电机和机器人系统。重点将放在使用高分辨率二维位置传感器开发Sawyer电机的闭环控制上。这将显著改善整个工作区域的性能，增加系统的速度和刚度。索耶电机用于许多晶圆探测和组装操作的机器人系统。该设备将支持的一些主要研究领域是高速定位装置的控制和结构振动阻尼。

9413543 Khorrami This research provides funds for research equipment for development of high-speed, ultra-accurate motors and robotic systems for advanced manufacturing applications. The focus will be on the development of closed-loop control of Sawyer motors using a high-resolution, two-dimensional position sensor. This should provide significantly improved performance over the entire work area, increasing both speed and stiffness of the system. The Sawyer motor is used in many robotic systems for wafer probing and assembly operations. Some of the major research areas that this equipment will support are the control of high-speed positioning devices and structural vibration damping.