Development of a Smart Pixel Array Design and Fabrication Facility

9413804约翰逊 术语“智能像素”是指显示器或光电检测器阵列中的图像元素，其可以具有以下属性中的一些或全部：存储器、像素内处理、像素间通信以及光电检测器和调制器或发射器形式的光学I/O。 智能像素阵列（SPA）是从无源寻址空间光调制器（SLM）和显示器发展而来的。 这些设备运动“简单：由放置在两个重叠电极之间的材料组成的图像元素，以响应两个电极之间的电位差来调制光波前的振幅、相位或偏振。 具有简单像素的SLM和显示器遭受低帧和刷新率，导致图像退化和重影、低分辨率和有限的像素功能。 通过在每个像素处结合有源电路，所谓的“智能像素”阵列克服了与它们的前辈相关联的许多问题。 工业界对该项目的兴趣很高，如Kopin公司、波音公司、罗克韦尔科学中心、RCA Sarnoff、博尔德非线性系统、Meadowlark光学公司、物理光学公司，福特研究实验室和鲍尔通信公司已经在与位于博尔德的科罗拉多大学（CU）的NSF/ERC合作开发光电计算系统（OCS）设计和制造适用于从微型显示器到智能车辆高速公路系统的智能摄像头的SPA。 这些行业每年已资助或承诺资助约322，471美元，以支持人员和SPA制造成本。 此外，Photonics Research Incorporated、science Applications Incorporated和Hughes Aircraft已与该中心签订了每年290，995美元的合同，以研究硅背板驱动垂直腔面发射激光器用于平行、自由空间光学互连。 为了提高LCOS智能像素阵列的质量和可制造性，从而确保其最终商业化，必须解决基于知识和基于技术的问题。 本提案中所要求的设备将为智能像素阵列技术建立第一个全面的计算机辅助设计、平面化以及先进的制造和封装设施。 特别是，我们建议与美国国家科学基金会和配套资金购买计算机工作站与彩色图形和彩色打印机的中央智能像素设计实验室，晶圆抛光和金属沉积系统，以平面化处理模具，并开发一个自动化机器人控制的包装设施，这将导致一个低成本的方法制造SPA。 这个世界级的设施将用于研究和研究培训的本科生和研究生，研究助理，教师和工业研究人员在微显示器和智能像素阵列设计领域的工作。 工作中的SPA将在库中编目。 将提供详细说明设计工作特性的文件，包括响应时间、响应度（使用光电探测器时）和I-V曲线（如适用）。 该项目的一个预期成果是设计用于头盔显示器的1024 X1180和2048 X2048智能像素阵列。 这些设备将投影6位模拟和全色数据。 用于增强夜视能力的高密度智能光电探测器阵列也将是这项研究的重点。 该项目的另一个主要成果是生产平面化的硅背板，从而为液晶调制器提供光学平坦表面。 最后，一个先进的制造和包装设施将产生一个低成本，机器人控制的方法来制造SPA。

9413804 Johnson The term "smart pixel" refers to picture elements in a display or photodetector array that may have some or all of the following attributes memory, intra-pixel processing, inter-pixel communication, and optical I/O in the form of photodetectors and modulators or emitters. Smart pixel arrays (SPAs) evolved form passive-addressed spatial light modulators (SLMs) and displays. These devices sport "simple: picture elements consisting of material placed between two overlapping electrodes to modulate the amplitude, phase, or polarization of an optical wave front in response to the potential difference between the two electrodes. SLMs and displays with simple pixels suffer form low frame and refresh rates resulting in image degradation and ghosting, low resolution, and limited pixel functionality. By incorporating active circuitry at each picture element, so-called "smart pixel" arrays overcome many of the problems associated with their predecessors. Industrial interest in the project is high as Kopin Corporation, Boeing, Rockwell Sciences Center, RCA Sarnoff, Boulder Nonlinear Systems, Meadowlark Optics, Physical Optics Corporation , Ford Research Laboratories and Ball Communications are already working with the NSF/ERC for Optoelectronic Computing Systems (OCS) at the University of Colorado at Boulder (CU) to design and fabricate SPAs for applications ranging from micro displays to smart cameras for the intelligent vehicle highway system. These industries have funded, or have committed to fund approximately $322,471 per year in support of personnel and SPA fabrication cost. In addition, Photonics Research Incorporated, science Applications Incorporated and Hughes Aircraft have contracted with the Center for another $290,995 per year to investigate silicon backplanes to drive vertical cavity surface emitting laser for parallel, free-space optical interconnects. There are knowledge-based and technology-based issues that must be addressed to improve the quality and manufact urability of LCOS smart pixel arrays, thus insuring their eventual commercialization. The equipment requested in this proposal will establish the first comprehensive computer-aided design, planarization, and advanced manufacturing and packaging facility for smart pixel array technology. In particular, we propose to purchase with NSF and matching funds computer workstations with color graphics and color printers for a centralized smart pixel design laboratory, wafer polishing and metal deposition systems to planarize the processed die, and develop an automated robotic controlled packaging facility that will lead the way to a low-cost method of manufacturing SPAs. This world class facility will be used for research and research training of undergraduate and graduate students, research associates, faculty, and industrial researchers working in the field of micro display and smart pixel array design. Working SPAs will be cataloged in a library. Documentation will be provided that detail the operating characteristics of the design, including response time, responsivity (when photodetectors are used) and I-V curves where appropriate. One anticipated result of this project is the design of 1024X1180 and 2048X2048 smart pixel arrays for helmet mounted displays. These devices will project 6 bits analog and full color data. High density smart photodetector arrays for enhanced night vision will also be a focus of this research. Another major result anticipated from this project is producing planarized silicon backplanes, resulting in an optically flat surface for the liquid crystal modulator. Finally, an advanced manufacturing and packaging facility will produce a low-cost, robotic-controlled method for manufacturing SPAs.