Integrated Optic Accelerometer with Six Degrees of Freedom

传统的加速度计技术产生了其敏感轴垂直于晶片表面的微机械结构。需要新的微机械设计和新的传感技术，允许微结构的敏感轴位于晶片的平面内，以便测量六个自由度。阐述了一种新的光学传感技术和一种新的微机械设计，它允许敏感轴位于晶片平面内，并消除了串扰。这具有几种结构可以单片集成在具有多自由度测量能力的同一晶片中的优点。该传感器集成了一个聚合物波导，并使用激光烧蚀材料来制造。主要任务是开发一种与所使用的所有材料的特性相兼容的制造工艺。将对影响聚合物波导性能的所有相关工艺参数进行全面研究。

Conventional techniques for accelerometers yield micromechanical structures whose sensitive axis is perpendicular to the surface of the wafer. There is a need for new micromechanical designs and new transduction techniques which allow the sensitive axis of the microstructures to lie in the plane of the wafer in order to measure six degrees of freedom. A new optical transduction technique and a new micromechanical design are illustrated which allow the sensitive axis to lie in the plane of the wafer and which eliminate cross-talk. This has the advantage that several structures can be integrated monolithically in the same wafer with multidegrees-of-freedom measurement capability. The sensor incorporates a polymer waveguide and is fabricated with the use of laser ablation of materials. The major task is to develop a fabrication process which is compatible with the characteristics of all the materials utilized. A comprehensive study of all the pertinent process parameters affecting the performance of the polymer waveguide will be conducted.