U.S.-Taiwan R.O.C. Cooperative Research: On the Application of Deep X-Ray Lithography in the formation of Microsensors and Microstructures

这是一个为期三年的奖项，由凯斯西方大学的刘忠俊博士和台湾新竹同步辐射中心（SRRC）的姚成博士提议。该提案要求提供旅费，以支持这两个研究所之间的研究合作，探索和开发深层X射线光刻技术在形成微传感器和其他微结构方面的应用。 LIGA工艺首先在德国开发，已经展示了通过精密光刻创建各种微结构的独特能力。 它是一项重要的技术，可以对现代生活的许多方面产生重大影响。 LIGA、传感器和致动器的集成可以使大范围的微制造工业受益。 在美国，从事这一研究领域的调查人员数量有限。 刘博士是传感器微加工方面的专家，非常适合开展这项合作。 台湾的同步加速器系统是最先进的设施，将为该项目提供束流时间和结构灵活性。 这是一个独特的机会，通常不会从美国的设施。 本计画由台湾国科会理事会共同出资，提供后勤费用，而国家科学基金会则提供研究人员的旅费。

This is a three year award proposed by Dr. Chung-Chiun Liu, the Case Western University and Dr. Yao Cheng, the Synchrotron Radiation Center (SRRC) in Hsinchu, Taiwan. This proposal requests travel funds to support research cooperation between these two institutes for exploring and developing the application of deep X-ray lithography in the formation of microsensors and other microstructures. The LIGA process, first developed in Germany, has demonstrated unique capabilities for creating a wide variety of microstructures through precision lithography. It is an important technology and can have a major impact on many aspects of modern life. The integration of LIGA, sensors and actuators can benefit a large range of microfabrication industries. The number of investigators engaged in this area of research is limited in the United States. Dr. Liu is an expert in the microfabrication of sensors, uniquely suited for carrying out this cooperation. The synchrotron system in Taiwan is a state-of-the-art facility and will provide beam time and structure flexibility for this project. This is a unique opportunity not generally available from the U.S. facilities. This project is jointly funded by the Taiwan National Science Council, which is providing the logistical costs, while the NSF supports the investigator's travel.