Processing of Oxide Superconducting Electronic Devices by the Inhibition Technique

本课题旨在推进高温超导氧化物的材料加工。目的有三个：1)系统地注入不同反应性的杂质离子，表征高温超导体（HTS）氧化物的电学和磁性能。这些结果用于确定抑制超导性的最佳注入条件。2)研究抑制材料的结构性能。离子扩散、捕集和通道对抑制的基本影响将被研究。3)实现基于离子抑制技术的单层和多层高温超导器件和电路的可靠制造工艺。我们将探讨三种不同的平面多层制造方法。重要的过程相关问题将解决，包括模式解决，过程控制和可靠性。此外，包括高性能射频线圈和超导量子干涉器件在内的几个原型设备预计将在项目过程中进行演示。该研究将在与磁共振成像（MRI）和磁心学相关的先进电子和磁性设备的几个方面的基础技术水平上贡献基础材料科学知识。此外，从本研究项目中获得的知识和理解有望通过为设计和加工先进材料和器件提供基本的理解和基础，为提高利用高温超导材料的先进器件和电路的性能做出贡献。该计划的一个重要特点是通过培养学生在一个基础和技术上重要的领域的研究和教育的整合。＊＊＊

9531208 Ma This research project aims to advance materials processing of high temperature superconducting oxides. The objectives are threefold: 1)To characterize the electrical and magnetic properties of high temperature superconductor (HTS) oxides which are systematically implanted with impurity ions of different reactivity. These results are used to determine optimum implantation conditions for inhibition of superconductivity. 2)To study the structural properties of inhibited materials. Fundamental effects of ion diffusion, gettering, and channeling on inhibition will be investigated. 3)To realize a reliable fabrication process for single layer and multilayer HTS devices and circuits based on the ion inhibition technique. Three different approaches to planar multilayer fabrication will be pursued. Important process related issues will be addressed including patterning resolution, process control, and reliability. Additionally, several prototype devices including high performance RF coils and superconducting quantum interference devices are expected to be demonstrated during the course of the project. %%% The research will contribute basic materials science knowledge at a fundamental level of technological relevance to several aspects of advanced electronic and magnetic devices with relevance to magnetic resonance imaging(MRI) and magnetocardiology. Additionally, the knowledge and understanding gained from this research project is expected to contribute in a general way to improving the performance of advanced devices and circuits utilizing high temperature superconducting materials by providing a fundamental understanding and a basis for designing and processing advanced materials and devices. An important feature of the program is the integration of research and education through the training of students in a fundamentally and technologically significant area. ***