CAREER: Understanding the Plasma Deposition of Amorphous Thin Films Using Advanced in situ Infrared Spectroscopies

摘要- Morrison - 9625095研究部分：本研究的目标是利用新颖的原位傅里叶变换红外（FTIR）诊断技术，对射频（RF）感应等离子体中的化学物质进行新的、基本的理解。该研究将首先研究甲烷等离子体和非晶碳膜（类金刚石碳或DLC）的生长，同时进行原位FTIR测量。虽然其硬度众所周知，但最近的初步研究表明，这些薄膜将成为出色的气体渗透屏障，并可用于场发射显示器。教育部分：工程教育在学生的学习方式和教师的教学方式之间存在不匹配。此外，学生很难掌握化学工程的跨学科性质，因为化学工程涉及数学、化学、物理和其他工程学科的概念。为了解决这些问题，教育计划将开始为流体力学的本科课程开发超文本课堂笔记。超文本课堂笔记可以使学习过程适应学生的学习风格，并为教师提供更多的反馈机会；这也使教师可以腾出时间来演示解决问题的技巧，而不是在黑板上写字。随着超文本的增长，与其他课程作业的链接成为可能，强调了工程的多学科性质。

Abstract - Morrison - 9625095 Research Portion: The goal of this research is to develop a new, fundamental understanding of the chemistry found in radio frequency (RF) induction plasmas using novel in situ Fourier transform infrared (FTIR) diagnostics. The research will initially investigate methane plasmas and the growth of amorphous carbon films (diamondlike carbon or DLC) while performing the in situ FTIR measurements. Although well known for their hardness, recent preliminary research indicates that these films would be outstanding gas permeation barriers and useful in field emission displays. Education Portion: Engineering education has a mismatch between the learning styles of the students and the teaching styles of the faculty. In addition, the students have difficulty grasping the interdisciplinary nature of chemical engineering which draws on concepts from mathematics, chemistry, physics, and other engineering disciplines. To address these issues, the education plan will begin developing hypertexted class notes for an undergraduate class in fluid mechanics. Hypertexted class notes allow the learning process to adapt to the learning style of the student as well as provide much opportunity for feedback to the instructor; it also frees the instructor to spend class time demonstration problem solving skills rather than writing on the board. As the hypertexting grows, links to other course work becomes possible, emphasizing the multidisciplinary nature of engineering.