SBIR Phase I: An Investigation of a Rheotaxial Growth of Diamond

*96-60155方这一期小企业创新研究项目将生长大面积单晶金刚石薄膜。在这种方法中，钻石将通过化学气相沉积过程在液体衬底上生长。这是取代传统的固体衬底上生长的方法。液态衬底的用途是其理想的平整度和无定形性(因此不存在晶界)。液态衬底为碳提供了很高的流动性，以促进在两个层面上的聚集：(I)碳原子在液体表面迁移形成金刚石微晶，(Ii)浮动的金刚石微晶聚集形成大的单晶。因此，本方法是对传统固体衬底的基本改变，并提供了生长大面积单晶金刚石的机会。大面积单晶金刚石薄膜的成功生长对实现金刚石电子器件和集成电路具有重要意义。***

*** 96-60155 Fang This Phase I Small Business Innovation Research Project will grow large area single crystal diamond films. In this approach, diamond will grow by a chemical vapor deposition process on a liquid substrate. This is to replace the conventional growth on solid substrate approach. The utilities of the liquid substrate are its ideal smoothness, and its amorphosity (and therefore an absence of grain boundaries). Liquid substrate provides a high mobility for carbon to facilitate an aggregation on two levels: (i) carbon atoms migrate on the liquid surface to form diamond crystallites, and, (ii) the floating diamond crystallites coalesce to form a large single crystal. Thus, the present approach represents a basic alteration from the conventional solid substrate and an opportunity to grow large area single crystal diamond is provided. Successfully grown large area single crystal diamond films will be essential to a realization of diamond electronic devices and integral circuits. ***