SBIR Phase I: In-Situ Fiber-Optic Magnetic Field Sensor Array for Real-Time Process Control in Physical-Vapor Deposition Cluster Modules

[摘要]本项目为小型企业创新研究一期项目，将开发一种用于原位过程传感的新型磁场传感器。正在研究的系统响应了半导体制造和智能光纤系统（IFOS）对实时过程控制新技术的需求，建议开发一个室温台式试验台，该试验台包括磁性定向电磁铁和半导体衬底卡盘的一部分，以及基于光纤光栅和磁致伸缩涂层等创新技术组合的磁传感器。在第一阶段，IFOS将：(1)建立传感器规格的详细信息，并设计和建模传感器探头和系统，(2)制造光纤传感器探头基板，包括光纤光栅，部分去除包层并涂覆磁致伸缩材料，(3)构建可行性原型测试平台，(4)测试和评估原型，(5)提交最终报告并提交第二阶段提案。这种首次将磁传感器结合到等离子体物理气相沉积（PVD）中，有望为薄膜头制造提供改进的过程控制，具有比传统方法更高的灵敏度和可靠性。在这项研究中开发的电无源、在线、可复用、低成本和可批量生产的传感器设计可以应用于原位过程传感，并将在航空航天、发电和其他行业中找到其他应用。上述特点使拟议的传感器具有市场价值，并可能吸引非联邦和私营部门的商业化资金。＊＊＊

*** ABSTRACT 96-61691 Black This Small Business Innovation Research Phase I project will develop a novel magnetic field sensor for in-situ process sensing. The system under investigation responds to the need for new techniques for real-time process control in semiconductor fabrication and Intelligent Fiber Optic Systems (IFOS) proposes to develop a room-temperature benchtop testbed comprising a magnetic orientation electromagnet and a portion of a semiconductor substrate chuck in conjunction with a magnetic sensor based on an innovative combination of technologies including fiber gratings and magnetostrictive coatings. During Phase I, IFOS will: (1) establish details of the sensor specifications, and design and model the sensor probes and system, (2) fabricate fiber sensor probe substrates involving fiber grating with claddings partially removed and coated by magnetostrictive material, (3) construct a feasibility prototype testbed, (4) test and evaluate prototype, and (5) deliver a final report and submit a Phase II proposal. This first-time incorporation of magnetic sensors in plasma Physical Vapor Deposition (PVD) is expected to offer improved process control for thin film head fabrication with higher sensitivity and reliability than conventional approaches. The electrically passive, in-line, multiplexible, low-cost, and mass producible sensor design developed during this research can be applied in in-situ process sensing and will find additional applications in the aerospace, electricity generation, and other industries. The aforementioned features make the proposed sensors marketable and will likely attract non-federal and private sector commercialization funding. ***