SBIR Phase I: Low Voltage High Resolution Scanning Electron Microscope

*9760987这个小型企业创新研究第一期项目是为了建造一个使用磁偶极子透镜作为物镜的低压扫描电子显微镜。这种设计的理论性能远远优于目前使用的任何透镜。透镜由一个永久磁化的球体组成。现在有了新的材料，这使得使用直径只有几毫米的球体成为可能，但却获得了高于任何商业可用球体的分辨率。利用这一概念，我们能够制造出比任何其他仪器成本更低、性能更高的扫描电子显微镜。完成后的显微镜将用于研究和开发设施，以高分辨率成像生物标本。这种显微镜对半导体芯片的检查也将是非常有价值的。***

*** 9760987 This Small Business Innovation Research Phase I project is for the construction of a low voltage SEM which uses a magnetic dipole lens as the objective lens. The theoretical performance of this design is far superior to any lens in current use. The lens consists of a permanently magnetized sphere. New materials are now available which make it feasible to use spheres of only a few mm in diameter and yet achieve a resolution superior to anything commercially available. Using this concept, we are in a position to fabricate SEMs which are lower in cost and higher in performance than any other instruments. The completed microscope will be used at research and development facilities for the imaging of biological specimens at high resolution. The microscope will also be extremely valuable for semiconductor chip inspection. ***