Investigation of Diamond-Forming Flames Using Advanced Laser Diagnostics and Laser Enhancement of the Deposition Rate

这是一个详细的研究，从实验和理论，在低压金刚石形成火焰的化学和传输过程。重点是在沉积基底附近的温度和自由基浓度的分布。广泛的测量温度和自由基种类H（原子氢），OH（羟基），（原子碳），和CH（甲烷）进行了一系列火焰压力，化学计量学，和总质量流率，并与数值火焰模型进行比较。实验工作在Robert Lucht博士的实验室进行，实验室有必要的低压火焰仪和激光诊断设备；模型是在Rick Glumac博士的实验室完成的。温度测量采用氢相干反斯托克斯拉曼光谱（H2 CARS）。诊断研究的重点是解决近基底区域的梯度。本文采用了在其他火焰合成环境中成功应用的火焰模型。以火焰温度分布和工艺参数为输入，通过模型预测火焰的种类分布；通过灵敏度分析研究了动力学和输运速率对实验和计算的影响。

Abstract - Lucht and Glumac This is a detailed investigation, both experimental and theoretical, of the chemistry and transport processes in low-pressure diamond-forming flames. The focus is on profiles of temperature and concentrations of radical species near the deposition substrate. Extensive measurements of temperature and of the radical species H (atomic hydrogen), OH (hydroxyl), (atomic carbon), and CH (methyne) are performed for a range of flame pressures, stoichiometries, and total mass flow rates and are compared with numerical flame models. The experimental work is performed in Dr. Robert Lucht's laboratory which has the necessary low-pressure flame apparatus and laser diagnostic equipment; the modeling is done in Dr. Rick Glumac's laboratory. Temperature measurements are made using hydrogen coherent anti-Stokes Raman spectroscopy (H2 CARS). The emphasis in the diagnostic studies is in resolving the gradients in the near-substrate region. A flame model that has been applied successfully in other flame synthesis environments is used. The flame temperature profile and process parameters are used as input, and the model predicts the species profiles; differences between experiment and computation are investigated with a sensitivity analysis to explore the influences of kinetic and transport rates.