Nutrient Cycling and Recycling Within Periphyton Communities

9871253 Mastrangelo在这份提案中，PI要求资金购买一台新的替代品，以取代密歇根大学固态实验室的口罩制造机。他们的ASET机器是由福特汽车公司于1993年1月捐赠的。 自从安装在他们的实验室里，这台机器已经为固态实验室内外的一百多个用户提供了服务，它已经成为一个必不可少的设备。 目前，这台机器为37名合格的正规学生操作员服务，为110多名学生提供服务，每年使用250个掩模板。 自1993年以来，大约有1000个光刻掩模板已经在这台机器上支持多达200个不同的学生项目，来自10多个不同的教职员工。 光刻掩模对于固态器件工作是必不可少的。 通常，每个学生每年需要多达20个口罩。 从外部来看，每台的价格在400 - 600美元之间。 在我们现有的系统中，每个面具的成本为50美元。 每年大约有250个口罩由UM教师每年节省约90，000美元。 掩模制作的高成本是固态实验室进行研究的一个明确的限制因素，他们的系统在降低这些成本方面很好地为他们服务。 虽然仍然有用，但目前的口罩制造机是1986年的型号，很难修理。 它的控制计算机和相关电路板的芯片不再生产。 缺少零件是一个严重的问题。 此外，它的机械部件已经显示出磨损的迹象。 因此，他们认为这台机器很快将不再受支持。 这将对所有使用该机器的研究项目产生重大影响，除非这种情况得到纠正，否则实验室的总体产量将大幅下降。 因此，他们必须申请资金来更换他们的系统。 更换我们的系统的成本为695，300美元（包括选项1，2和4）。虽然昂贵，但新机器的光学分辨率略高于旧系统，但它具有全新的机械部件，因此可靠性更高。 芯片尺寸将保持在目前的大尺寸（2 cm），但分辨率（1.1 um）会有所下降，因为我们的大多数传感器和MEMS项目都需要大芯片能力（分辨率更高的掩模制造商无法在这些大芯片上进行投影）。 ***

9871253 Mastrangelo In this proposal the PIs request funds to purchase a new replacement for their mask maker machine at the University of Michigan Solid-State Laboratory. Their ASET machine was donated by Ford Motor Company in January of 1993. Since it was installed in their lab, this machine has served more than one hundred of users, both internal and external to the Solid-State Laboratory, and it has become an essential piece of equipment. Currently, this machine serves 37 regular qualified student operators serving more than 110 students, with an annual usage of 250 mask plates per year. Since 1993, approximately 1000 lithographic mask plates have been made in this machine in support of as many as 200 different student projects from more than 1O different faculty members. Photolithographic masks are essential for solid state device work. Typically, as many as 20 masks per student per year are required. Externally, each of these costs between $400-$600. With our existent system each mask is made at a cost of $50. Approximately 250 masks are made per year by the UM faculty resulting in roughly $90,000 of savings per year. The high cost of mask making is a definite limiting factor in the research performed at the Solid-State lab, and their system has served them well in reducing these costs. While still useful, the current mask making machine is a 1986 model, and it is difficult to repair. Its controlling computer and associated boards have chips no longer manufactured. The lack of parts is a serious concern. Further, its mechanical parts already show signs of wear. Therefore, they believe that this machine will soon no longer be supportable. This will have a major impact in all the research projects that utilize the machine, and unless this situation is remedied, the overall laboratory output will drop substantially. Therefore, they must request funds to replace their system. The replacement of our system has a cost of $695,300 (options 1,2, and 4 included).While expensive, a new machine has slightly better optical resolution that the older system, but it has completely new mechanical parts therefore a much greater reliability. The die size will remain at its current large size (2 cm) at the expense of resolution (1.1 um) because most of our sensor and MEMS projects need the large die capability (mask makers with finer resolution cannot project over these large dies). ***