Microelectronics Education Enhancement Program

微技术是一个迅速发展的领域，它从集成电路制造的根源发展到从生物技术到高密度微制造的广泛应用。CRCD的这项名为“微电子教育强化计划”的建议，通过为学生提供教育机会和实践经验来解决这一重要的微技术领域，这些课程定义了广泛的微处理技术领域。该计划的目标是从大二开始，一直延伸到研究生研究，介绍和开发从基础科学到应用的一系列微技术课程，包括为学生提供的实验室和研究机会。这将通过使用一套新的课程向学生介绍跨学科的微技术理论和应用来实现：新的二年级课程将向学生介绍硅的材料特性以及它在微电子和微电子机械系统(MEMS)中的应用；三年级的实验室课程，旨在提供光刻和蚀刻以及开发和表征简单结构的实践经验；重新配置的半导体加工高级课程以及电子材料和器件封装的相关课程；以及一门研究生水平的工艺集成课程，它将作为对半导体应用感兴趣的学生的顶峰课程，与现有的作为MEMS领域顶峰的课程相辅相成。这些课程将伴随着本科生和研究生在微技术领域从MEMS到高级微处理器研究的全方位研究机会。

Microtechnology is a rapidly expanding field that is growing from its roots in integrated circuit fabrication to a broad array of applications that range from biotechnology to high-density microfabrication. This CRCD proposal entitled, "Microelectronics Education Enhancement Program," addresses this important field of microtechnology by providing students with opportunities for education and hands-on experience in subjects that define the broad microprocessing technology area.The goal of this program is to introduce and develop a range of microtechnology courses from basic science to applications, including laboratory and research opportunities for students, beginning in the sophomore year and extending through graduate research. This will be accomplished by introducing students to the multi-disciplinary breadth of microtechnological theory and application using a new set of courses:A new sophomore course that will introduce students to the materials properties of Si and it applications in microelectronics and microelectromechanical systems(MEMS);A junior year laboratory course, designed to provide hands-on experience in lithography and etching, and in developing and characterizing simple structures;A reconfigured senior level course on semiconductor processing along with related courses in electronic materials and device packaging; and A process integration course at the graduate level that will act as the capstone course for students interested in semiconductor applications, to accompany an existing course that serves as a capstone in the MEMS area.These courses will be accompanied by a full range of research opportunities for both undergraduate and graduate students in the area of microtechnology, from MEMS to advanced microprocessor research.