Integrated Optical Monitoring: Enabling Technology for MEMS Feedback Control

该研究项目将设计、制作原型并实验评估集成导波和自由空间微光学系统，以实现过程兼容、集成光学监测（IOM），用于原位测量、状态反馈和MEMS控制。利用光学互连研究界开发的知识库，聚合物集成光波导和平面/折叠衍射微光学技术将被定义为在表面微机械（SMM） MEMS中常规插入光学器件。基于这些技术的IOM的开发和评估将在使用已建立的SMM代工厂（例如MUMPS， Sandia MDL）制造的选定测试台上完成，以促进MEMS社区对开发的IOM技术的接受和使用。试验台将由具有通用微机械功能的“标准单元”MEMS以及由耦合通用器件组成的复杂应用特定MEMS组成。利用正在进行的正式合作，Sandia Microengine将作为应用程序特定的测试平台。使用基于iom的状态反馈的闭环控制系统将用于通用测试平台MEMS，然后将这些系统用作微引擎应用特定测试平台控制的构建块

9821018HornakThis research project will design, prototype, and experimentally evaluate both integrated guided wave and free-space micro-optical systems for achieving process compatible, integrated optical monitoring (IOM) for in-situ metrology, state feedback, and control of MEMS. Leveraging the knowledge base developed within the optical interconnect research community, polymer integrated optical waveguide and planar/folded diffractive micro-optics technologies will be defined for routine insertion of optics within surface micromachined (SMM) MEMS. Development and evaluation of IOM based on these technologies will be accomplished within selected testbeds fabricated using established SMM foundries (e.g. MUMPS, Sandia MDL) in order to facilitate the acceptance and use of the developed IOM techniques by the MEMS community. Testbeds will consist of "standard cell" MEMS with generic micromechanical functions as well as a complex application specific MEMS comprised of coupled generic devices. Leveraging an ongoing formal collaboration, the Sandia Microengine will serve as the application specific testbed. Closed-loop control systems using IOM-based state feedback will be developed for generic testbed MEMS and these systems then used as building blocks in the control of the Microengine application specific testbed.***