SBIR Phase I: Ultra-Hard Boron Coatings through Vacuum Arc Deposition

这个小型企业创新研究第一阶段项目是利用加热固体硼阴极的真空阴极电弧制造高密度、高粘接、润滑、超硬硼涂层的原理证明。涂层的首选结构将是硼的无定形亚氧化物（11或22 B到1 O），它具有高表面硬度与弹性模量比，并且已经在橡树岭国家实验室（ORNL）生产和研究（采用不太具有商业吸引力的方法）。技术任务是改进现有的阴极电弧设置以获得更好的真空完整性，改进硼阴极及其支撑结构的结构完整性，以及加热阴极的方法。所得到的薄膜将在ORNL的同一设施进行分析，之前研究的硼涂层是在这里生产和分析的。这个阶段的重点是实现正确的化学计量。阴极电弧的优点是离子能量控制，衬底温度低，避免了等离子体辅助化学气相沉积中涉及的有毒气体。硼涂层具有优异的硬度、摩擦学（低摩擦）和耐腐蚀性。它们的高温兼容性使其成为先进汽车应用的理想选择。例如，这种涂层可以在高温、低热损失的柴油发动机中消除对润滑剂的需求，从而大大减少颗粒排放。

9860374 This Small Business Innovation Research Phase I project is a proof of principle for the fabrication of high density, highly adhesive, lubricious, ultra hard boron coatings using a vacuum cathodic arc with a heated, solid boron cathode. The preferred structure of the coating will be an amorphous sub oxide of boron (11 or 22 B to 1 O), which has a high surface hardness to elastic modulus ratio and has been and produced (with less commercially attractive methods) and studied at the Oak Ridge National Laboratory (ORNL). The technical tasks are to improve an existing cathodic arc setup for better vacuum integrity, improve the structural integrity of the boron cathode and its support structure, as well as the method of heating the cathode. The resulting films will be analyzed at the same ORNL facility, where the previously studied boron coatings were produced and analyzed. The emphasis in this phase is in achieving the correct stoichiometry. The advantages of the cathodic arc are control of ion energies, low substrate temperatures and the avoidance of toxic gases involved in plasma assisted chemical vapor deposition. Boron coatings have excellent hardness, tribological (low friction) and corrosion resistance properties. Their high temperature compatibility would make them ideal for advanced automotive applications. For example, such coatings would eliminate the need for lubricants in high temperature, low heat loss diesel engines, leading to substantial reduction in particulate emissions.